Collomb David, Li Penglei, Bending Simon
Department of Physics, University of Bath, Bath, United Kingdom.
J Phys Condens Matter. 2021 May 18;33(24). doi: 10.1088/1361-648X/abf7e2.
Hall sensors have become one of the most used magnetic sensors in recent decades, performing the vital function of providing a magnetic sense that is naturally absent in humans. Various electronic applications have evolved from circuit-integrated Hall sensors due to their low cost, simple linear magnetic field response, ability to operate in a large magnetic field range, high magnetic sensitivity and low electronic noise, in addition to many other advantages. Recent developments in the fabrication and performance of graphene Hall devices promise to open up the realm of Hall sensor applications by not only widening the horizon of current uses through performance improvements, but also driving Hall sensor electronics into entirely new areas. In this review paper we describe the evolution from the traditional selection of Hall device materials to graphene Hall devices, and explore the various applications enabled by them. This includes a summary of the selection of materials and architectures for contemporary micro-to nanoscale Hall sensors. We then turn our attention to introducing graphene and its remarkable physical properties and explore how this impacts the magnetic sensitivity and electronic noise of graphene-based Hall sensors. We summarise the current state-of-the art of research into graphene Hall probes, demonstrating their record-breaking performance. Building on this, we explore the various new application areas graphene Hall sensors are pioneering such as magnetic imaging and non-destructive testing. Finally, we look at recent encouraging results showing that graphene Hall sensors have plenty of room to improve, before then discussing future prospects for industry-level scalable fabrication.
近几十年来，霍尔传感器已成为使用最广泛的磁传感器之一，它发挥着至关重要的作用，能提供人类天生所没有的磁感。由于其成本低、线性磁场响应简单、能在大磁场范围内工作、磁灵敏度高以及电子噪声低等诸多优点，各种电子应用已从电路集成霍尔传感器发展而来。石墨烯霍尔器件在制造和性能方面的最新进展有望开拓霍尔传感器应用领域，不仅通过性能提升拓宽当前应用范围，还能将霍尔传感器电子技术带入全新领域。在这篇综述论文中，我们描述了从传统霍尔器件材料选择到石墨烯霍尔器件的演变，并探讨了它们所实现的各种应用。这包括对当代微纳尺度霍尔传感器材料和架构选择的总结。然后我们将注意力转向介绍石墨烯及其卓越的物理特性，并探讨这如何影响基于石墨烯的霍尔传感器的磁灵敏度和电子噪声。我们总结了石墨烯霍尔探针目前的研究现状，展示了它们破纪录的性能。在此基础上，我们探索了石墨烯霍尔传感器正在开拓的各种新应用领域，如磁成像和无损检测。最后，我们审视了近期令人鼓舞的结果，表明石墨烯霍尔传感器仍有很大的改进空间，然后讨论了工业级可扩展制造的未来前景。
