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隧穿磁阻传感器传感特性的偏置电压依赖性

Bias Voltage Dependence of Sensing Characteristics in Tunneling Magnetoresistance Sensors.

作者信息

Wiśniowski Piotr, Nawrocki Maciej, Wrona Jerzy, Cardoso Susana, Freitas Paulo P

机构信息

Institute of Electronics, AGH University of Science and Technology, 30-059 Krakow, Poland.

Singulus Technologies AG, 63796 Kahl am Main, Germany.

出版信息

Sensors (Basel). 2021 Apr 3;21(7):2495. doi: 10.3390/s21072495.

Abstract

One of the characteristic features of tunneling magnetoresistance (TMR) sensors is a strong influence of bias voltage on tunneling current. Since fundamental sensing characteristics of the sensors are primarily determined by the tunneling current, the bias voltage should impact these characteristics. Previous research has indeed showed the influence of the bias voltage on the magnetic field detection and sensitivity. However, the effect has not been investigated for nonlinearity and hysteresis and the influence of bias voltage polarity has not yet been addressed. Therefore, this paper systematically investigates the dependence of field sensitivity, nonlinearity, hysteresis and magnetic field detection of CoFeB/MgO/CoFeB-based magnetoresistance sensors on bias voltage magnitude and polarity. The sensitivity and field detection of all sensors improved significantly with the bias, whereas the nonlinearity and hysteresis deteriorated. The sensitivity increased considerably (up to 32 times) and linearly with bias up to 0.6 V. The field detection also decreased substantially (up 3.9 times) with bias and exhibited the minimum values for the same magnitude under both polarities. Significant and linear increases with bias were also observed for nonlinearity (up to 26 times) and hysteresis (up to 33 times). Moreover, not only the voltage magnitude but also the polarity had a significant effect on the sensing characteristics. This significant, linear and simultaneous effect of improvement and deterioration of the sensing characteristics with bias indicates that both bias voltage magnitude and polarity are key factors in the control and modification of these characteristics.

摘要

隧穿磁阻(TMR)传感器的一个特征是偏置电压对隧穿电流有强烈影响。由于传感器的基本传感特性主要由隧穿电流决定,因此偏置电压应会影响这些特性。先前的研究确实表明了偏置电压对磁场检测和灵敏度的影响。然而,尚未研究其对非线性和磁滞的影响,且偏置电压极性的影响也未得到探讨。因此,本文系统地研究了基于CoFeB/MgO/CoFeB的磁阻传感器的场灵敏度、非线性、磁滞和磁场检测对偏置电压大小和极性的依赖性。所有传感器的灵敏度和场检测随着偏置而显著提高,而非线性和磁滞则变差。灵敏度大幅增加(高达32倍),并在偏置电压达到0.6 V之前呈线性增加。场检测也随着偏置而大幅降低(高达3.9倍),并且在两种极性下相同大小的偏置电压下呈现最小值。非线性(高达26倍)和磁滞(高达33倍)也随着偏置呈现显著的线性增加。此外,不仅电压大小,而且极性对传感特性也有显著影响。传感特性随偏置而显著、线性且同时出现改善和恶化的这种效应表明,偏置电压大小和极性都是控制和改变这些特性的关键因素。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5d58/8038319/08f8ddd8bfb2/sensors-21-02495-g001.jpg

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