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亚纳特斯拉场在恶劣环境下 PHMR 传感器分辨率的操作参数。

Operational Parameters for Sub-Nano Tesla Field Resolution of PHMR Sensors in Harsh Environments.

机构信息

Department of Emerging Materials Science, DGIST, Daegu 42988, Korea.

Magnetics Initiative Life Care Research Center, DGIST, Daegu 42988, Korea.

出版信息

Sensors (Basel). 2021 Oct 18;21(20):6891. doi: 10.3390/s21206891.

DOI:10.3390/s21206891
PMID:34696103
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8539847/
Abstract

The resolution of planar-Hall magnetoresistive (PHMR) sensors was investigated in the frequency range from 0.5 Hz to 200 Hz in terms of its sensitivity, average noise level, and detectivity. Analysis of the sensor sensitivity and voltage noise response was performed by varying operational parameters such as sensor geometrical architectures, sensor configurations, sensing currents, and temperature. All the measurements of PHMR sensors were carried out under both constant current (CC) and constant voltage (CV) modes. In the present study, Barkhausen noise was revealed in noise component and found less significant in the PHMR sensor configuration. Under measured noise spectral density at optimized conditions, the best magnetic field detectivity was achieved better than 550 pT/√Hz at 100 Hz and close to 1.1 nT/√Hz at 10 Hz for a tri-layer multi-ring PHMR sensor in an unshielded environment. Furthermore, the promising feasibility and possible routes for further improvement of the sensor resolution are discussed.

摘要

平面霍尔磁阻（PHMR）传感器的分辨率在 0.5 Hz 至 200 Hz 的频率范围内，从灵敏度、平均噪声水平和探测率三个方面进行了研究。通过改变传感器几何结构、传感器配置、传感电流和温度等工作参数，对传感器灵敏度和电压噪声响应进行了分析。所有 PHMR 传感器的测量都是在恒流（CC）和恒压（CV）两种模式下进行的。在本研究中，巴克豪森噪声在噪声分量中被揭示出来，并且在 PHMR 传感器配置中发现其影响较小。在优化条件下，根据噪声谱密度的测量，在无屏蔽环境下，三层多环 PHMR 传感器在 100 Hz 时实现了优于 550 pT/√Hz 的最佳磁场探测率，在 10 Hz 时接近 1.1 nT/√Hz。此外，还讨论了提高传感器分辨率的有前景的可行性和可能途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06dd/8539847/095a4ce8e7ff/sensors-21-06891-g012.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06dd/8539847/fc01c841cedc/sensors-21-06891-g002.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06dd/8539847/e51ee35d2409/sensors-21-06891-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06dd/8539847/4055d7758b44/sensors-21-06891-g009.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06dd/8539847/da916aed4052/sensors-21-06891-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06dd/8539847/095a4ce8e7ff/sensors-21-06891-g012.jpg

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