Fedorov Rostislav, Lederle Felix, Li Mingji, Olszok Vinzent, Wöbbeking Karl, Schade Wolfgang, Hübner Eike G
Fraunhofer Heinrich Hertz Institute HHI, Fiber Optical Sensor Systems, Am Stollen 19 H, 38640, Goslar, Germany.
Clausthal University of Technology, Institute of Particle Technology, Leibnizstr. 19, 38678, Clausthal-Zellerfeld, Germany.
Chempluschem. 2021 Sep;86(9):1231-1242. doi: 10.1002/cplu.202100118. Epub 2021 May 7.
Coatings based on titanium nitrides, titanium carbides and silicon carbides can optimize the surface properties of titanium or silicon for various applications ranging from biocompatibility to chemical stability and durability. Here, we investigated a high power (100 W) high pulse repetition rate femtosecond laser process (λ=1030 nm, τ=750 fs, f=1 MHz) for the treatment of titanium and silicon in atmospheres of argon, nitrogen, methane, ethene and acetylene. In a nitrogen atmosphere, a homogeneous coating of TiON is formed on titanium. In an ethene/argon atmosphere coatings of TiOC and SiC are formed on Ti and Si, respectively. The process allows a fast surface transformation with a process rate of 0.33 cm s and a high spatial resolution below 0.5 mm with a minimal heat affected zone at the same time. In contrast to low repetition rate femtosecond laser processed samples, the surfaces are more robust against mechanical impact. At the same time, the surfaces reveal a distinct microstructure in comparison to coatings obtained by vapor deposition techniques.
基于氮化钛、碳化钛和碳化硅的涂层可以优化钛或硅的表面性能，以适用于从生物相容性到化学稳定性和耐久性等各种应用。在此，我们研究了一种高功率（100 W）、高脉冲重复率的飞秒激光工艺（λ=1030 nm，τ=750 fs，f=1 MHz），用于在氩气、氮气、甲烷、乙烯和乙炔气氛中处理钛和硅。在氮气气氛中，钛表面形成均匀的TiON涂层。在乙烯/氩气气氛中，Ti和Si表面分别形成TiOC和SiC涂层。该工艺能够实现快速的表面转变，加工速率为0.33 cm/s，同时具有低于0.5 mm的高空间分辨率以及最小的热影响区。与低重复率飞秒激光加工的样品相比，这些表面对机械冲击更具耐受性。与此同时，与通过气相沉积技术获得的涂层相比，这些表面呈现出独特的微观结构。
