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用于空气和液体中生物/化学检测的集成谐振式微/纳重力传感器

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid.

作者信息

Jia Hao, Xu Pengcheng, Li Xinxin

机构信息

State Key Lab of Transducer Technology, Shanghai Institute of Microsystem & Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.

出版信息

Micromachines (Basel). 2021 May 31;12(6):645. doi: 10.3390/mi12060645.

DOI:10.3390/mi12060645
PMID:34073049
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8227694/
Abstract

Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality () factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.

摘要

具有片上集成激励和读出组件的谐振微纳机电系统（MEMS/NEMS）展现出极高的重量灵敏度，在过去二十年中极大地推动了生物/化学传感器技术的发展。本文综述了主要用于空气和液体中生物/化学传感应用的集成MEMS/NEMS谐振器的发展情况。人们利用了不同的振动模式（弯曲、扭转、面内和平伸模式）来提高粘性介质中的品质（Q）因数和质量传感性能。这种谐振质量传感器在检测气相和液相中的多种痕量分析物方面显示出巨大潜力，如化学蒸汽、挥发性有机化合物、污染气体、细菌、生物标志物和DNA。集成MEMS/NEMS质量传感器将不断推动痕量生物/化学分子的检测极限，并加深对气体/纳米材料相互作用和分子结合机制的理解。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/c492a5d97a2e/micromachines-12-00645-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/ac7212fb0392/micromachines-12-00645-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/3a60d76490e5/micromachines-12-00645-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/5c2321c00640/micromachines-12-00645-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/4d5c7338b07a/micromachines-12-00645-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/a50a56df4b50/micromachines-12-00645-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/e7ac18670960/micromachines-12-00645-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/bcb4f79a1596/micromachines-12-00645-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/c492a5d97a2e/micromachines-12-00645-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/ac7212fb0392/micromachines-12-00645-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/3a60d76490e5/micromachines-12-00645-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/5c2321c00640/micromachines-12-00645-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/4d5c7338b07a/micromachines-12-00645-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/a50a56df4b50/micromachines-12-00645-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/e7ac18670960/micromachines-12-00645-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/bcb4f79a1596/micromachines-12-00645-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/899d/8227694/c492a5d97a2e/micromachines-12-00645-g008.jpg

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