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具有出色灵敏度均匀性和温度分布的MEMS谐振梁,用于精确气体传感和片上热重分析。

MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA.

作者信息

Lu Zheng, Jia Hao, Wang Ding, Yu Haitao

机构信息

School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China.

State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

出版信息

Sensors (Basel). 2024 Apr 13;24(8):2495. doi: 10.3390/s24082495.

Abstract

Micromechanical resonators have aroused growing interest as biological and chemical sensors, and microcantilever beams are the main research focus. Recently, a resonant microcantilever with an integrated heater has been applied in on-chip thermogravimetric analysis (TGA). However, there is a strong relationship between the mass sensitivity of a resonant microcantilever and the location of adsorbed masses. Different sampling positions will cause sensitivity differences, which will result in an inaccurate calculation of mass change. Herein, an integrated H-shaped resonant beam with uniform mass sensitivity and temperature distribution is proposed and developed to improve the accuracy of bio/chemical sensing and TGA applications. Experiments verified that the presented resonant beam possesses much better uniformity of sensitivity and temperature distribution compared with resonant microcantilevers. Gas-sensing and TGA experiments utilizing the integrated resonant beam were also carried out and exhibited good measurement accuracy.

摘要

微机械谐振器作为生物和化学传感器已引起越来越多的关注,微悬臂梁是主要的研究重点。最近,一种集成加热器的谐振微悬臂已应用于片上热重分析(TGA)。然而,谐振微悬臂的质量灵敏度与吸附质量的位置之间存在很强的关系。不同的采样位置会导致灵敏度差异,从而导致质量变化的计算不准确。在此,提出并开发了一种具有均匀质量灵敏度和温度分布的集成H形谐振梁,以提高生物/化学传感和TGA应用的准确性。实验证明,与谐振微悬臂相比,所提出的谐振梁具有更好的灵敏度和温度分布均匀性。利用集成谐振梁进行的气敏和TGA实验也进行了,并且显示出良好的测量精度。

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