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使用半导体纳米线和纳米带的高性能薄膜晶体管。

High-performance thin-film transistors using semiconductor nanowires and nanoribbons.

作者信息

Duan Xiangfeng, Niu Chunming, Sahi Vijendra, Chen Jian, Parce J Wallace, Empedocles Stephen, Goldman Jay L

机构信息

Nanosys, Inc., Advanced Research Center, 200 Boston Ave, Medford, Massachusetts 02155, USA.

出版信息

Nature. 2003 Sep 18;425(6955):274-8. doi: 10.1038/nature01996.

Abstract

Thin-film transistors (TFTs) are the fundamental building blocks for the rapidly growing field of macroelectronics. The use of plastic substrates is also increasing in importance owing to their light weight, flexibility, shock resistance and low cost. Current polycrystalline-Si TFT technology is difficult to implement on plastics because of the high process temperatures required. Amorphous-Si and organic semiconductor TFTs, which can be processed at lower temperatures, but are limited by poor carrier mobility. As a result, applications that require even modest computation, control or communication functions on plastics cannot be addressed by existing TFT technology. Alternative semiconductor materials that could form TFTs with performance comparable to or better than polycrystalline or single-crystal Si, and which can be processed at low temperatures over large-area plastic substrates, should not only improve the existing technologies, but also enable new applications in flexible, wearable and disposable electronics. Here we report the fabrication of TFTs using oriented Si nanowire thin films or CdS nanoribbons as semiconducting channels. We show that high-performance TFTs can be produced on various substrates, including plastics, using a low-temperature assembly process. Our approach is general to a broad range of materials including high-mobility materials (such as InAs or InP).

摘要

薄膜晶体管(TFT)是快速发展的宏观电子学领域的基本构建单元。由于塑料基板重量轻、柔韧性好、抗冲击且成本低,其应用也越来越重要。目前的多晶硅TFT技术由于所需的高加工温度而难以在塑料上实现。非晶硅和有机半导体TFT可以在较低温度下加工,但受限于较差的载流子迁移率。因此,现有的TFT技术无法满足在塑料上实现哪怕是适度计算、控制或通信功能的应用需求。能够形成性能与多晶硅或单晶硅相当或更好的TFT,并且可以在大面积塑料基板上低温加工的替代半导体材料,不仅应改进现有技术,还应在柔性、可穿戴和一次性电子产品中实现新的应用。在此,我们报告了使用取向硅纳米线薄膜或硫化镉纳米带作为半导体通道制造TFT的方法。我们表明,通过低温组装工艺,可以在包括塑料在内的各种基板上生产高性能TFT。我们的方法适用于包括高迁移率材料(如砷化铟或磷化铟)在内的广泛材料。

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