Institute for Electronics, Swiss Federal Institute of Technology , Gloriastrasse 35, Zürich, 8092, Switzerland.
Institute of Mechanical Systems, Swiss Federal Institute of Technology , Leonhardstrasse 21, Zürich, 8092, Switzerland.
ACS Appl Mater Interfaces. 2017 Aug 30;9(34):28750-28757. doi: 10.1021/acsami.7b08153. Epub 2017 Aug 21.
Although recent progress in the field of flexible electronics has allowed the realization of biocompatible and conformable electronics, systematic approaches which combine high bendability (<3 mm bending radius), high stretchability (>3-4%), and low complexity in the fabrication process are still missing. Here, we show a technique to induce randomly oriented and customized wrinkles on the surface of a biocompatible elastomeric substrate, where Thin-Film Transistors (TFTs) and circuits (inverter and logic NAND gates) based on amorphous-IGZO are fabricated. By tuning the wavelength and the amplitude of the wrinkles, the devices are fully operational while bent to 13 μm bending radii as well as while stretched up to 5%, keeping unchanged electrical properties. Moreover, a flexible rectifier is also realized, showing no degradation in the performances while flat or wrapped on an artificial human wrist. As proof of concept, transparent TFTs are also fabricated, presenting comparable electrical performances to the nontransparent ones. The extension of the buckling approach from our TFTs to circuits demonstrates the scalability of the process, prospecting applications in wireless stretchable electronics to be worn or implanted.
尽管柔性电子领域的最新进展已经实现了生物相容性和可弯曲电子设备,但仍缺乏结合高弯曲度(<3 毫米弯曲半径)、高拉伸度(>3-4%)和低制造工艺复杂性的系统方法。在这里,我们展示了一种在生物相容性弹性体基底表面上诱导随机定向和定制褶皱的技术,其中基于非晶态 IGZO 的薄膜晶体管(TFT)和电路(反相器和逻辑 NAND 门)被制造出来。通过调整褶皱的波长和幅度,即使在弯曲半径为 13μm 以及拉伸至 5%时,器件也能完全正常工作,且保持不变的电性能。此外,还实现了一个柔性整流器,即使在平坦或包裹在人造手腕上时,其性能也没有下降。作为概念验证,还制造了透明 TFT,其电性能与不透明 TFT 相当。我们的 TFT 从屈曲方法扩展到电路展示了该工艺的可扩展性,有望应用于可穿戴或植入式无线可拉伸电子产品。