Leeuwenhoek Maarten, Groenewoud Freek, van Oosten Kees, Benschop Tjerk, Allan Milan P, Gröblacher Simon
Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands.
Leiden Institute of Physics, Leiden University, Niels Bohrweg 2, 2333CA Leiden, The Netherlands.
Microsyst Nanoeng. 2020 Nov 2;6:99. doi: 10.1038/s41378-020-00209-y. eCollection 2020.
A reduction of the interprobe distance in multiprobe and double-tip scanning tunneling microscopy to the nanometer scale has been a longstanding and technically difficult challenge. Recent multiprobe systems have allowed for significant progress by achieving distances of ~30 nm using two individually driven, traditional metal wire tips. For situations where simple alignment and fixed separation can be advantageous, we present the fabrication of on-chip double-tip devices that incorporate two mechanically fixed gold tips with a tip separation of only 35 nm. We utilize the excellent mechanical, insulating and dielectric properties of high-quality SiN as a base material to realize easy-to-implement, lithographically defined and mechanically stable tips. With their large contact pads and adjustable footprint, these novel tips can be easily integrated with most existing commercial combined STM/AFM systems.
在多探针和双尖端扫描隧道显微镜中将探针间距离减小到纳米尺度一直是一个长期存在且技术上颇具挑战性的难题。近期的多探针系统通过使用两个单独驱动的传统金属丝尖端实现了约30纳米的距离，取得了显著进展。对于简单对准和固定间距可能具有优势的情况，我们展示了片上双尖端器件的制造，该器件包含两个机械固定的金尖端，尖端间距仅为35纳米。我们利用高质量氮化硅优异的机械、绝缘和介电性能作为基础材料，以实现易于制造、光刻定义且机械稳定的尖端。凭借其大接触垫和可调节尺寸，这些新型尖端可轻松与大多数现有的商用组合式STM/AFM系统集成。
