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展示了一种基于溶液的、可卷对卷配置的柔性换能器装置的渐进式组装,该装置由微图案化电极上的功能性纳米线组成。

Demonstration of a roll-to-roll-configurable, all-solution-based progressive assembly of flexible transducer devices consisting of functional nanowires on micropatterned electrodes.

作者信息

Han Inhui, Song Jungkeun, Kim Kwangjun, Kim Hyein, Son Hyunji, Kim Minwook, Lee Useung, Choi Kwangjin, Ji Hojae, Lee Sung Ho, Kwak Moon Kyu, Ok Jong G

机构信息

Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, 232 Gongneung-Ro, Nowon-Gu, Seoul, 01811, Republic of Korea.

Department of Mechanical Engineering, Dong-A University, 37 Nakdong-Daero 550-Gil, Saha-Gu, Busan, 49315, Republic of Korea.

出版信息

Sci Rep. 2023 Jul 24;13(1):11980. doi: 10.1038/s41598-023-38635-3.

Abstract

We demonstrate continuous fabrication of flexible transducer devices consisting of interdigitated (IDT) Ag microelectrodes interconnected by ZnO nanowires (ZNWs), created via serially connected solution-processable micro- and nanofabrication processes. On an Ag layer obtainable from the mild thermal reduction of an ionic Ag ink coating, the roll-to-roll-driven photolithography process [termed photo roll lithography (PRL)] followed by wet-etching can be applied to continuously define the IDT microelectrode structure. Conformal ZNWs can then be grown selectively on the Ag electrodes to interconnect them via an Ag-mediated hydrothermal ZNW growth that does not require high-temperature seed sintering. Given that all of these constitutive processes are vacuum-free and solution-processable at a low temperature, and are compatible with continuous processing onto flexible substrates, they can be eventually configured into the roll-to-roll-processable progressive assembly. Through parametric optimizations of processes consisting of the roll-to-roll-configurable, solution-based progressive assembly of nanostructures (ROLSPAN), a flexible transducer consisting of ZNW-interconnected, PRL-ed IDT Ag electrodes can be developed. This flexible architecture faithfully performs UV sensing as well as optoelectronic transduction. The ROLSPAN concept along with its specific applicability to flexible devices may inspire many diverse functional systems requiring high-throughput low-temperature fabrication over large-area flexible substrates.

摘要

我们展示了由通过氧化锌纳米线(ZNW)互连的叉指式(IDT)银微电极组成的柔性换能器器件的连续制造过程,该过程通过串联连接的可溶液处理的微纳制造工艺实现。在通过离子银墨水涂层的温和热还原获得的银层上,可应用卷对卷驱动的光刻工艺[称为光卷光刻(PRL)],随后进行湿法蚀刻,以连续定义IDT微电极结构。然后,可以通过银介导的水热ZNW生长在银电极上选择性地生长保形的ZNW,以将它们互连,该生长过程不需要高温种子烧结。鉴于所有这些组成过程都是无真空的且可在低温下进行溶液处理,并且与在柔性基板上的连续处理兼容,它们最终可以配置成卷对卷可加工的渐进组装。通过对由纳米结构的卷对卷可配置、基于溶液的渐进组装(ROLSPAN)组成的过程进行参数优化,可以开发出一种由ZNW互连、PRL蚀刻的IDT银电极组成的柔性换能器。这种柔性结构能够如实地执行紫外线传感以及光电转换。ROLSPAN概念及其对柔性器件的特定适用性可能会激发许多需要在大面积柔性基板上进行高通量低温制造的各种功能系统。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/06ec/10366188/67d31e7bb40d/41598_2023_38635_Fig1_HTML.jpg

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