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采用多重图案化胶体光刻技术实现了在可见光至近红外波段具有耐热性的氮化钛宽带吸收体的可扩展制造。

Multiple-patterning colloidal lithography-implemented scalable manufacturing of heat-tolerant titanium nitride broadband absorbers in the visible to near-infrared.

作者信息

Lee Dasol, Go Myeongcheol, Kim Minkyung, Jang Junho, Choi Chungryong, Kim Jin Kon, Rho Junsuk

机构信息

Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 37673 Republic of Korea.

Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 37673 Republic of Korea.

出版信息

Microsyst Nanoeng. 2021 Mar 2;7:14. doi: 10.1038/s41378-020-00237-8. eCollection 2021.

DOI:10.1038/s41378-020-00237-8
PMID:34567729
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8433139/
Abstract

Broadband perfect absorbers have been intensively researched for decades because of their near-perfect absorption optical property that can be applied to diverse applications. Unfortunately, achieving large-scale and heat-tolerant absorbers has been remained challenging work because of costly and time-consuming lithography methods and thermolability of materials, respectively. Here, we demonstrate a thermally robust titanium nitride broadband absorber with >95% absorption efficiency in the visible and near-infrared region (400-900 nm). A relatively large-scale (2.5 cm × 2.5 cm) absorber device is fabricated by using a fabrication technique of multiple-patterning colloidal lithography. The optical properties of the absorber are still maintained even after heating at the temperatures >600 C. Such a large-scale, heat-tolerant, and broadband near-perfect absorber will provide further useful applications in solar thermophotovoltaics, stealth, and absorption controlling in high-temperature conditions.

摘要

几十年来,宽带完美吸收体因其近乎完美的吸收光学特性而受到广泛研究,这种特性可应用于多种领域。不幸的是,由于光刻方法成本高、耗时,以及材料的热稳定性问题,实现大规模且耐热的吸收体一直是具有挑战性的工作。在此,我们展示了一种热稳定性强的氮化钛宽带吸收体,在可见光和近红外区域(400 - 900纳米)具有大于95%的吸收效率。通过使用多重图案化胶体光刻的制造技术,制备了一个相对大规模(2.5厘米×2.5厘米)的吸收体器件。即使在温度高于600℃加热后,吸收体的光学特性仍能保持。这样一种大规模、耐热且宽带近乎完美的吸收体将在太阳能热光伏、隐身以及高温条件下的吸收控制等方面提供更多有用的应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9ac7/8433139/b80a8fef2f22/41378_2020_237_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9ac7/8433139/b29a4252b40f/41378_2020_237_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9ac7/8433139/b80a8fef2f22/41378_2020_237_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9ac7/8433139/b29a4252b40f/41378_2020_237_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9ac7/8433139/b80a8fef2f22/41378_2020_237_Fig2_HTML.jpg

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