Faculty of Mechanical, Maritime and Materials Engineering, Department of Materials Science and Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands.
Faculty of Mechanical, Maritime and Materials Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands.
Adv Mater. 2022 Jan;34(3):e2106248. doi: 10.1002/adma.202106248. Epub 2021 Nov 24.
From ultrasensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room-temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes, which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bioinspired resonator is then fabricated, experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room-temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design that does not require sub-micrometer lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. These results demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.
从基本力的超高灵敏度探测器到量子网络和传感器,机械谐振器正在使下一代技术能够在室温环境下运行。目前,氮化硅纳米谐振器作为这些进展中的领先微芯片平台,允许机械谐振器的运动与环境热噪声显著隔离。然而,迄今为止,人类的直觉仍然是设计过程的驱动力。在这里,受自然启发并由机器学习指导,开发了一种蜘蛛网纳米机械谐振器,其振动模式通过数据驱动的优化算法发现的新颖“扭转软夹紧”机制与环境热环境隔离。然后制造了这种仿生谐振器,实验证实了在室温环境下具有超过 10 亿的品质因数的力学新范例。与其他最先进的谐振器相比,这一里程碑是通过紧凑的设计实现的,该设计不需要亚微米光刻特征或复杂的声子带隙,因此在大规模制造时更加容易和便宜。这些结果表明,机器学习有能力与人类直觉协同工作,以增加创造性的可能性,并在计算和纳米技术中发现新策略。