Froemel Joerg, Diguet Gildas, Muroyama Masanori
Division for the Establishment of Frontier Sciences, Organization for Advanced Studies, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan.
Advanced Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan.
Sensors (Basel). 2021 Nov 15;21(22):7578. doi: 10.3390/s21227578.
By using the stress-impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.
通过利用软磁非晶态FeCuNbSiB合金的应力阻抗（SI）效应，制备并表征了一种微机械力传感器。该合金用作厚度为500 nm的溅射薄膜。为了阐明该材料作为薄膜时的SI效应，首先研究了其磁性能和机械性能。磁导率的应力依赖性被证明是由所使用的换能器效应引起的。溅射薄膜还表现出983 GPa的高屈服强度。尽管该器件的制造技术非常简单，但表征显示其应变片系数（GF）为756，这比诸如压阻效应等传统换能器效应所实现的应变片系数大几倍。所制备的器件作为触觉传感器具有很大的应用潜力。
