College of Engineering, Universiti Malaysia Pahang, 26300, Gambang, Pahang, Malaysia.
Faculty of Electronics and Computer Engineering, Universiti Teknikal Malaysia Melaka, Hang Tuah Jaya, 76100 Durian Tunggal, Melaka, Malaysia.
Biomed Microdevices. 2021 Dec 3;24(1):3. doi: 10.1007/s10544-021-00595-8.
Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or microwave radiation. For fast switching and continuous applications, hotplate or Peltier elements can be employed. However, due to bulkiness, they are ineffective for portable applications or operation at remote locations. Miniaturization of heaters reduces power consumption and bulkiness, enhances the thermal response, and integrates with several sensors or microfluidic chips. The microheater has a thickness of ~ 100 nm to ~ 100 μm and offers a temperature range up to 1900℃ with precise control. In recent years, due to the escalating demand for flexible electronics, thin-film microheaters have emerged as an imperative research area. This review provides an overview of recent advancements in microheater as well as analyses different microheater designs, materials, fabrication, and temperature control. In addition, the applications of microheaters in gas sensing, biological, and electrical and mechanical sectors are emphasized. Moreover, the maximum temperature, voltage, power consumption, response time, and heating rate of each microheater are tabulated. Finally, we addressed the specific key considerations for designing and fabricating a microheater as well as the importance of microheater integration in COVID-19 diagnostic kits. This review thereby provides general guidelines to researchers to integrate microheater in micro-electromechanical systems (MEMS), which may pave the way for developing rapid and large-scale SARS-CoV-2 diagnostic kits in resource-constrained clinical or home-based environments.
加热在科学、工程、采矿和太空领域中起着至关重要的作用，其中可以通过电、感应、红外或微波辐射来实现加热。对于快速切换和连续应用，可以使用加热板或珀耳帖元件。然而，由于体积庞大，它们对于便携式应用或在偏远位置操作并不有效。加热器的小型化可以降低功耗和体积，增强热响应，并与多个传感器或微流控芯片集成。微加热器的厚度为 100nm 至 100μm，温度范围高达 1900℃，并具有精确的控制。近年来，由于对柔性电子产品的需求不断增加，薄膜微加热器已成为一个必要的研究领域。本综述概述了微加热器的最新进展，并分析了不同的微加热器设计、材料、制造和温度控制。此外，还强调了微加热器在气体传感、生物、电气和机械等领域的应用。此外，还列出了每个微加热器的最高温度、电压、功耗、响应时间和加热速率。最后，我们讨论了设计和制造微加热器的具体关键考虑因素，以及微加热器在 COVID-19 诊断试剂盒中的集成的重要性。本综述为研究人员提供了在微机电系统（MEMS）中集成微加热器的一般指南，这可能为在资源有限的临床或家庭环境中开发快速和大规模的 SARS-CoV-2 诊断试剂盒铺平道路。
