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表面声波器件的非线性研究

Research in Nonlinearity of Surface Acoustic Wave Devices.

作者信息

Tian Yahui, Wang Litian, Wang Yuanyuan, Li Yang, Wu Haoxiang, Qian Lirong, Li Honglang, Wu Jinghui, Wang Ji

机构信息

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China.

School of Integrated Circuit Science and Engineering, Tianjin University of Technology, Tianjin 300384, China.

出版信息

Micromachines (Basel). 2021 Nov 26;12(12):1454. doi: 10.3390/mi12121454.

DOI:10.3390/mi12121454
PMID:34945304
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8707454/
Abstract

Surface acoustic wave (SAW) devices are one of the indispensable components in the radio frequency (RF) front-end of mobile phones. With the development of mobile communication technology, the requirements for linear specification of devices are more and more strict. Nonlinear distortions of SAW devices have a serious influence on the application of mobile RF modules. To satisfy the strict requirement of linearity of communication system, it is necessary to understand the generation mechanism of nonlinearity and study the accurate modeling, appropriate measurement methods, and nonlinear response elimination technology. In this paper, we summarize the research progress on the nonlinearity of SAW devices in recent years from four aspects: the generation mechanism, simulation methods, measurement system, and suppression technology. The nonlinear harmonics with the nonlinear Mason equivalent circuit model are simulated. Furthermore, harmonics and intermodulation signals of SAW filters are tested by the authors. Thanks to these research studies, it is of great significance to the development of future RF front-end modules with high linear SAW devices.

摘要

表面声波（SAW）器件是手机射频（RF）前端不可或缺的组件之一。随着移动通信技术的发展，对器件线性指标的要求越来越严格。SAW器件的非线性失真对移动射频模块的应用有严重影响。为了满足通信系统对线性度的严格要求，有必要了解非线性的产生机制，并研究精确建模、合适的测量方法以及非线性响应消除技术。在本文中，我们从产生机制、仿真方法、测量系统和抑制技术四个方面总结了近年来SAW器件非线性方面的研究进展。利用非线性梅森等效电路模型对非线性谐波进行了仿真。此外，作者还对SAW滤波器的谐波和互调信号进行了测试。得益于这些研究，对于开发具有高线性SAW器件的未来射频前端模块具有重要意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/b53a1eb5e380/micromachines-12-01454-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/6a0e0a51e6e3/micromachines-12-01454-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/e9dce11ceb10/micromachines-12-01454-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/5e9d8ecdd015/micromachines-12-01454-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/f29270854b5c/micromachines-12-01454-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/2f40e94f4f51/micromachines-12-01454-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/749e7e0fca94/micromachines-12-01454-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/bc1ef856c82f/micromachines-12-01454-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/8351aecd80ce/micromachines-12-01454-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/5b7f1a93f874/micromachines-12-01454-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/b53a1eb5e380/micromachines-12-01454-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/6a0e0a51e6e3/micromachines-12-01454-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/e9dce11ceb10/micromachines-12-01454-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/5e9d8ecdd015/micromachines-12-01454-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/f29270854b5c/micromachines-12-01454-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/2f40e94f4f51/micromachines-12-01454-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/749e7e0fca94/micromachines-12-01454-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/bc1ef856c82f/micromachines-12-01454-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/8351aecd80ce/micromachines-12-01454-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/5b7f1a93f874/micromachines-12-01454-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/85ad/8707454/b53a1eb5e380/micromachines-12-01454-g010.jpg

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Simulation of Nonlinear Resonance, Amplitude-Frequency, and Harmonic Generation Effects in SAW and BAW Devices.声表面波（SAW）和体声波（BAW）器件中非线性共振、振幅 - 频率及谐波产生效应的模拟
IEEE Trans Ultrason Ferroelectr Freq Control. 2020 Feb;67(2):422-430. doi: 10.1109/TUFFC.2019.2945522. Epub 2019 Oct 4.
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P Matrix Analysis of Surface Acoustic Waves in Piezoelectric Phononic Crystals.
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Micromachines (Basel). 2022 Mar 14;13(3):439. doi: 10.3390/mi13030439.
IEEE Trans Ultrason Ferroelectr Freq Control. 2016 May;63(5):757-763. doi: 10.1109/TUFFC.2016.2531079. Epub 2016 Feb 18.