Li Baichuan, Zhang Qiaozhen, Zhao Xiangyong, Zhi Shaotao, Qiu Luyan, Fu Sulei, Wang Weibiao
College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China.
Key Laboratory of Optoelectronic Material and Device, Department of Physics, Shanghai Normal University, Shanghai 200234, China.
Micromachines (Basel). 2022 Jul 15;13(7):1116. doi: 10.3390/mi13071116.
This article presents a general-purpose model that enables efficient and accurate calculation of third-order nonlinear signals in surface acoustic wave (SAW) devices. This model is based on piezoelectric constitutive equations combined with perturbation theory, which can be analyzed by full finite element method (FEM). For validation, third-order harmonic (H3) responses and intermodulation distortions (IMD3) in SAW resonators are simulated, and their calculation results fit well to experimental data in the literature. Then, the generation mechanisms of the third-order nonlinearity in SAW resonators are discussed. The dominant generation mechanisms for different nonlinear signals and the relation between electrode materials and H3 peak magnitude are revealed, which provides an important guideline for further nonlinear suppression.
本文提出了一种通用模型，该模型能够高效、准确地计算表面声波（SAW）器件中的三阶非线性信号。该模型基于压电本构方程并结合微扰理论，可通过全有限元方法（FEM）进行分析。为进行验证，对SAW谐振器中的三阶谐波（H3）响应和互调失真（IMD3）进行了模拟，其计算结果与文献中的实验数据吻合良好。然后，讨论了SAW谐振器中三阶非线性的产生机制。揭示了不同非线性信号的主要产生机制以及电极材料与H3峰值幅度之间的关系，这为进一步的非线性抑制提供了重要指导。
