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氢化钛膜和氢化锆膜的阳极氧化

Anodizing of Hydrogenated Titanium and Zirconium Films.

作者信息

Poznyak Alexander, Pligovka Andrei, Salerno Marco

机构信息

Department of Electronic Technology and Engineering, Belarusian State University of Informatics and Radioelectronics, 6 Brovki Str., 220013 Minsk, Belarus.

Research and Development Laboratory 4.10 "Nanotechnologies", Belarusian State University of Informatics and Radioelectronics, 6 Brovki Str., 220013 Minsk, Belarus.

出版信息

Materials (Basel). 2021 Dec 7;14(24):7490. doi: 10.3390/ma14247490.

Abstract

Magnetron-sputtered thin films of titanium and zirconium, with a thickness of 150 nm, were hydrogenated at atmospheric pressure and a temperature of 703 K, then anodized in boric, oxalic, and tartaric acid aqueous solutions, in potentiostatic, galvanostatic, potentiodynamic, and combined modes. A study of the thickness distribution of the elements in fully anodized hydrogenated zirconium samples, using Auger electron spectroscopy, indicates the formation of zirconia. The voltage- and current-time responses of hydrogenated titanium anodizing were investigated. In this work, fundamental possibility and some process features of anodizing hydrogenated metals were demonstrated. In the case of potentiodynamic anodizing at 0.6 M tartaric acid, the increase in titanium hydrogenation time, from 30 to 90 min, leads to a decrease in the charge of the oxidizing hydrogenated metal at an anodic voltage sweep rate of 0.2 V·s. An anodic voltage sweep rate in the range of 0.05-0.5 V·s, with a hydrogenation time of 60 min, increases the anodizing efficiency (charge reduction for the complete oxidation of the hydrogenated metal). The detected radical differences in the time responses and decreased efficiency of the anodic process during the anodizing of the hydrogenated thin films, compared to pure metals, are explained by the presence of hydrogen in the composition of the samples and the increased contribution of side processes, due to the possible features of the formed oxide morphologies.

摘要

采用磁控溅射法制备了厚度为150 nm的钛和锆薄膜,在常压和703 K温度下进行氢化处理,然后在硼酸、草酸和酒石酸水溶液中分别采用恒电位、恒电流、动电位和组合模式进行阳极氧化。利用俄歇电子能谱对完全阳极氧化的氢化锆样品中元素的厚度分布进行研究,结果表明形成了氧化锆。研究了氢化钛阳极氧化的电压和电流-时间响应。在这项工作中,展示了氢化金属阳极氧化的基本可能性和一些工艺特点。在0.6 M酒石酸中进行动电位阳极氧化时,钛氢化时间从30分钟增加到90分钟,在阳极电压扫描速率为0.2 V·s时,会导致氢化金属氧化电荷减少。在氢化时间为60分钟时,阳极电压扫描速率在0.05 - 0.5 V·s范围内,会提高阳极氧化效率(氢化金属完全氧化所需的电荷减少)。与纯金属相比,氢化薄膜阳极氧化过程中检测到的时间响应存在显著差异以及阳极过程效率降低,这是由于样品成分中存在氢以及由于形成的氧化物形态的可能特点导致副反应贡献增加所致。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b22e/8706227/b1c616bdfb9d/materials-14-07490-g001.jpg

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