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绘制生长在铟铝砷应力源上的应变工程外延锗的界面电子结构。

Mapping the Interfacial Electronic Structure of Strain-Engineered Epitaxial Germanium Grown on In Al As Stressors.

作者信息

Clavel Michael B, Liu Jheng-Sin, Bodnar Robert J, Hudait Mantu K

机构信息

Advanced Devices and Sustainable Energy Laboratory (ADSEL), Bradley Department of Electrical and Computer Engineering, Virginia Tech, Blacksburg, Virginia 24061, United States.

Fluids Research Laboratory, Department of Geosciences, Virginia Tech, Blacksburg, Virginia 24061, United States.

出版信息

ACS Omega. 2022 Feb 8;7(7):5946-5953. doi: 10.1021/acsomega.1c06203. eCollection 2022 Feb 22.

DOI:10.1021/acsomega.1c06203
PMID:35224355
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8867572/
Abstract

The indirect nature of silicon (Si) emission currently limits the monolithic integration of photonic circuitry with Si electronics. Approaches to circumvent the optical shortcomings of Si include band structure engineering via alloying (e.g., Si Ge Sn ) and/or strain engineering of group IV materials (e.g., Ge). Although these methods enhance emission, many are incapable of realizing practical lasing structures because of poor optical and electrical confinement. Here, we report on strong optoelectronic confinement in a highly tensile-strained (ε) Ge/InAlAs heterostructure as determined by X-ray photoemission spectroscopy (XPS). To this end, an ultrathin (∼10 nm) ε-Ge epilayer was directly integrated onto the InAlAs stressor using an in situ, dual-chamber molecular beam epitaxy approach. Combining high-resolution X-ray diffraction and Raman spectroscopy, a strain state as high as ε ∼ 1.75% was demonstrated. Moreover, high-resolution transmission electron microscopy confirmed the highly ordered, pseudomorphic nature of the as-grown ε-Ge/InAlAs heterostructure. The heterointerfacial electronic structure was likewise probed via XPS, revealing conduction- and valence band offsets (Δ and Δ ) of 1.25 ± 0.1 and 0.56 ± 0.1 eV, respectively. Finally, we compare our empirical results with previously published first-principles calculations investigating the impact of heterointerfacial stoichiometry on the ε-Ge/In Al As energy band offset, demonstrating excellent agreement between experimental and theoretical results under an AsGe interface stoichiometry exhibiting up to two monolayers of heterointerfacial As-Ge diffusion. Taken together, these findings reveal a new route toward the realization of on-Si photonics.

摘要

目前,硅(Si)发射的间接特性限制了光子电路与硅电子器件的单片集成。规避硅光学缺陷的方法包括通过合金化(例如,Si Ge Sn )进行能带结构工程和/或对IV族材料(例如,Ge)进行应变工程。尽管这些方法增强了发射,但由于光学和电学限制较差,许多方法无法实现实际的激光结构。在此,我们报告了通过X射线光电子能谱(XPS)确定的在高拉伸应变(ε)的Ge/InAlAs异质结构中的强光电限制。为此,使用原位双室分子束外延方法将超薄(约10 nm)的ε-Ge外延层直接集成到InAlAs应力层上。结合高分辨率X射线衍射和拉曼光谱,证明了高达ε ∼ 1.75%的应变状态。此外,高分辨率透射电子显微镜证实了生长的ε-Ge/InAlAs异质结构的高度有序、赝晶性质。同样通过XPS探测了异质界面电子结构,分别揭示了1.25 ± 0.1和0.56 ± 0.1 eV的导带和价带偏移(Δ 和Δ )。最后,我们将我们 的实验结果与先前发表的研究异质界面化学计量对ε-Ge/In Al As能带偏移影响的第一性原理计算进行了比较,证明了在AsGe界面化学计量高达两个异质界面As-Ge扩散单层的情况下,实验和理论结果之间具有出色的一致性。综上所述,这些发现揭示了实现硅基光子学的一条新途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/032ed16765bf/ao1c06203_0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/ac726e781f02/ao1c06203_0002.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/032ed16765bf/ao1c06203_0008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/ac726e781f02/ao1c06203_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/df0371de765f/ao1c06203_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/9e88ef012489/ao1c06203_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/51f9e49c5182/ao1c06203_0005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/3613d75e630d/ao1c06203_0006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/2898e3766e01/ao1c06203_0007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4e0c/8867572/032ed16765bf/ao1c06203_0008.jpg

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