Electronics Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, Mexico.
Chemistry Engineering Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, Mexico.
Sensors (Basel). 2022 Feb 25;22(5):1806. doi: 10.3390/s22051806.
In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.
在本文中，我们提出了一种用于生物传感应用的混合半导体结构，其特点是将纳米机电系统与著名的金属氧化物半导体技术相结合。所提出的结构具有 MOSFET 作为读出元件，以及由薄气隙和隧道氧化层与衬底隔离的双端固支梁。梁结构通过薄的生物靶标层进行功能化，其主要目的是检测特定的一组生物分子，如酶、细菌、病毒和 DNA/RNA 链等。在这里，进行了三维有限元分析，以研究功能化的双端固支梁的行为。制造和特征化过程的初步结果表明，模拟和测量特性之间具有良好的一致性。
