Chen Dan, Wang Yunming, Zhou Helezi, Huang Zhigao, Zhang Yun, Guo Chuan Fei, Zhou Huamin
School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China.
Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, China.
Adv Mater. 2022 Dec;34(52):e2200903. doi: 10.1002/adma.202200903. Epub 2022 Jun 9.
Polymers are widely used in optical devices, electronic devices, energy-harvesting/storage devices, and sensors, owing to their low weight, excellent flexibility, and simple fabrication process. With advancements in micro/nanoprocessing techniques and more demanding application requirements, it is becoming necessary to realize high-resolution fabrication of polymers to prepare miniaturized devices. This is particularly because conventional processing technologies suffer from high thermal stress and strong adhesion/friction, which can irreversibly damage the micro/nanostructures of miniaturized devices. In addition, although the use of advanced fabrication methods to prepare high-resolution micro/nanostructures is explored, these methods are limited to laboratory research or small-batch production. This review focuses on the micro/nanoprocessing of polymeric materials and devices with high spatial precision and replication accuracy for industrial applications. Specifically, the current state-of-the-art techniques and future trends for micro/nanomolding, high-energy beam processing, and micro/nanomachining are discussed. Moreover, an overview of the fabrication and applications of various polymer-based elements and devices such as microlenses, biosensors, and transistors is provided. These techniques are expected to be widely applied for multiscale and multimaterial processing as well as for multifunction integration in next-generation integrated devices, such as photoelectric, smart, and biodegradable devices.
聚合物因其重量轻、柔韧性好且制造工艺简单，而被广泛应用于光学器件、电子器件、能量收集/存储器件及传感器中。随着微纳加工技术的进步以及应用需求的不断提高，实现聚合物的高分辨率制造以制备小型化器件变得愈发必要。这主要是因为传统加工技术存在高热应力以及较强的粘附力/摩擦力，可能会对小型化器件的微纳结构造成不可逆的损害。此外，尽管人们探索了使用先进制造方法来制备高分辨率微纳结构，但这些方法仅限于实验室研究或小批量生产。本综述聚焦于具有高空间精度和复制精度的聚合物材料及器件的微纳加工，以用于工业应用。具体而言，讨论了微纳成型、高能束加工和微纳加工的当前先进技术及未来趋势。此外，还概述了各种基于聚合物的元件和器件（如微透镜、生物传感器和晶体管）的制造及应用。这些技术有望广泛应用于多尺度和多材料加工以及下一代集成器件（如光电、智能和可生物降解器件）的多功能集成。
