Ficai Denisa, Gheorghe Marin, Dolete Georgiana, Mihailescu Bogdan, Svasta Paul, Ficai Anton, Constantinescu Gabriel, Andronescu Ecaterina
Department of Inorganic Chemistry, Physical Chemistry and Electrochemistry Faculty of Applied Chemistry and Materials Science, University Politehnica of Bucharest, Gh. Polizu 1-7, 011061 Bucharest, Romania.
National Research Center for Food Safety, University Politehnica of Bucharest, Splaiul Independentei 313, 060042 Bucharest, Romania.
Micromachines (Basel). 2022 Feb 23;13(3):351. doi: 10.3390/mi13030351.
Microelectromechanical systems (MEMS) have been increasingly used worldwide in a wide range of applications, including high tech, energy, medicine or environmental applications. Magnetic polymer composite films have been used extensively in the development of the micropumps and valves, which are critical components of the microelectromechanical systems. Based on the literature survey, several polymers and magnetic micro and nanopowders can be identified and, depending on their nature, ratio, processing route and the design of the device, their performances can be tuned from simple valves and pumps to biomimetic devices, such as, for instance, hearth ventricles. In many such devices, polymer magnetic films are used, the disposal of the magnetic component being either embedded into the polymer or coated on the polymer. One or more actuation zones can be used and the flow rate can be mono-directional or bi-directional depending on the design. In this paper, we review the main advances in the development of these magnetic polymer films and derived MEMS: microvalve, micropump, micromixer, microsensor, drug delivery micro-systems, magnetic labeling and separation microsystems, etc. It is important to mention that these MEMS are continuously improving from the point of view of performances, energy consumption and actuation mechanism and a clear tendency in developing personalized treatment. Due to the improved energy efficiency of special materials, wearable devices are developed and be suitable for medical applications.
微机电系统（MEMS）在全球范围内已越来越多地应用于广泛的领域，包括高科技、能源、医学或环境应用。磁性聚合物复合薄膜已广泛用于微泵和阀门的开发，而微泵和阀门是微机电系统的关键部件。基于文献调研，可以确定几种聚合物以及磁性微粉和纳米粉，并且根据它们的性质、比例、加工路线和器件设计，其性能可以从简单的阀门和泵调整到仿生器件，例如心脏心室。在许多此类器件中，使用聚合物磁性薄膜，磁性成分的处理方式要么是嵌入聚合物中，要么是涂覆在聚合物上。可以使用一个或多个驱动区域，并且根据设计，流速可以是单向的或双向的。在本文中，我们综述了这些磁性聚合物薄膜及衍生的微机电系统（如微阀、微泵、微混合器、微传感器、药物递送微系统、磁性标记和分离微系统等）开发方面的主要进展。必须指出的是，这些微机电系统在性能、能耗和驱动机制方面不断改进，并且在开发个性化治疗方面有明显趋势。由于特殊材料提高了能源效率，可穿戴设备得以开发并适用于医疗应用。
