Suppr超能文献

具有单片集成LED激发功能的超薄无光学元件光谱仪。

Ultrathin Optics-Free Spectrometer with Monolithically Integrated LED Excitation.

作者信息

Sarwar Tuba, Ku Pei-Cheng

机构信息

Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave, Ann Arbor, MI 48109-2122, USA.

出版信息

Micromachines (Basel). 2022 Feb 27;13(3):382. doi: 10.3390/mi13030382.

Abstract

A semiconductor spectrometer chip with a monolithically integrated light-emitting diode was demonstrated. The spectrometer design was based on a computational reconstruction algorithm and a series of absorptive spectral filters directly built in to the photodetectors' active regions. The result is the elimination of the need to employ external optics to control the incident angle of light. In the demonstration, an array of gallium nitride (GaN) based photodetectors with wavelength selectivity generated via the principle of local strain engineering were designed and fabricated. Additionally, a GaN based LED was monolithically integrated. An optical blocking structure was used to suppress the LED-photodetector interference and was shown to be essential for the spectroscopic functionality. A proof of concept using a reflection spectroscopy configuration was experimentally conducted to validate the feasibly of simultaneously operating the LED excitation light source and the photodetectors. Spectral reconstruction using a non-negative least squares (NNLS) algorithm enhanced with orthogonal matching pursuit was shown to reconstruct the signal from the reflection spectroscopy. Optics-free operation was also demonstrated.

摘要

展示了一种具有单片集成发光二极管的半导体光谱仪芯片。该光谱仪设计基于一种计算重建算法以及一系列直接内置在光电探测器有源区的吸收式光谱滤光片。结果是无需使用外部光学器件来控制光的入射角。在演示中,设计并制造了基于氮化镓(GaN)的具有通过局部应变工程原理产生的波长选择性的光电探测器阵列。此外,还单片集成了一个基于GaN的发光二极管。使用了一种光阻挡结构来抑制发光二极管 - 光电探测器干扰,并且已证明该结构对于光谱功能至关重要。通过实验进行了使用反射光谱配置的概念验证,以验证同时操作发光二极管激发光源和光电探测器的可行性。结果表明,使用通过正交匹配追踪增强的非负最小二乘法(NNLS)算法进行光谱重建能够从反射光谱中重建信号。还演示了无光学器件操作。

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