Zhang Haochen, Huang Chen, Song Kang, Yu Huabin, Xing Chong, Wang Danhao, Liu Zhongling, Sun Haiding
School of Microelectronics, University of Science and Technology of China, Hefei, Anhui 230026, People's Republic of China.
Rep Prog Phys. 2021 Mar 26;84(4). doi: 10.1088/1361-6633/abde93.
Wide bandgap aluminum gallium nitride (AlGaN) semiconductor alloys have established themselves as the key materials for building ultraviolet (UV) optoelectronic and power electronic devices. However, further improvements to device performance are lagging, largely due to the difficulties in precisely controlling carrier behavior, both carrier generation and carrier transport, within AlGaN-based devices. Fortunately, it has been discovered that instead of using AlGaN layers with fixed Al compositions, by grading the Al composition along the growth direction, it is possible to (1) generate high-density electrons and holes via polarization-induced doping; (2) manipulate carrier transport behavior via energy band modulation, also known as 'band engineering'. Consequently, such compositionally graded AlGaN alloys have attracted extensive interest as promising building blocks for efficient AlGaN-based UV light emitters and power electronic devices. In this review, we focus on the unique physical properties of graded AlGaN alloys and highlight the key roles that such graded structures play in device exploration. Firstly, we elaborate on the underlying mechanisms of efficient carrier generation and transport manipulation enabled by graded AlGaN alloys. Thereafter, we comprehensively summarize and discuss the recent progress in UV light emitters and power electronic devices incorporating graded AlGaN structures. Finally, we outline the prospects associated with the implementation of graded AlGaN alloys in the pursuit of high-performance optoelectronic and power electronic devices.
宽带隙氮化铝镓(AlGaN)半导体合金已成为制造紫外(UV)光电器件和功率电子器件的关键材料。然而,器件性能的进一步提升却滞后了,这主要是由于在基于AlGaN的器件中精确控制载流子行为(包括载流子产生和载流子输运)存在困难。幸运的是,人们发现,通过沿生长方向对Al成分进行分级,而不是使用具有固定Al成分的AlGaN层,可以(1)通过极化诱导掺杂产生高密度的电子和空穴;(2)通过能带调制(也称为“能带工程”)来操纵载流子输运行为。因此,这种成分分级的AlGaN合金作为高效的基于AlGaN的紫外发光器件和功率电子器件的有前途的构建块,已引起广泛关注。在这篇综述中,我们专注于分级AlGaN合金的独特物理性质,并强调这种分级结构在器件开发中所起的关键作用。首先,我们阐述了分级AlGaN合金实现高效载流子产生和输运操纵的潜在机制。此后,我们全面总结并讨论了包含分级AlGaN结构的紫外发光器件和功率电子器件的最新进展。最后,我们概述了在追求高性能光电器件和功率电子器件过程中实施分级AlGaN合金的前景。