Mo Guowei, Cui Yunxian, Yin Junwei, Gao Pengfei
Mechanical and Electronic Engineering, College of Mechanical Engineering, Dalian Jiaotong University, Dalian 116024, China.
Micromachines (Basel). 2022 Feb 28;13(3):390. doi: 10.3390/mi13030390.
At present, piezoelectric sensors are primarily applied in health monitoring areas. They may fall off owing to the adhesive's durability, and even damage the monitored equipment. In this paper, a piezoelectric film sensor (PFS) based on a positive piezoelectric effect (PPE) is presented and a ZnO film is deposited on a GH4169 superalloy steel (GSS) substrate using magnetron sputtering. The microstructure and micrograph of ZnO piezoelectric thin films were analyzed by an X-ray diffractometer (XRD), energy dispersive spectrometer (EDS), scanning electron microscope (SEM), and atomic force microscope (AFM). The results showed that the surface morphology was dense and uniform and had a good c-axis-preferred orientation. According to the test results of five piezoelectric sensors, the average value of the longitudinal piezoelectric coefficient was 1.36 pC/N, and the average value of the static calibration sensitivity was 19.77 mV/N. We selected the sensor whose parameters are closest to the average value for the dynamic test experiment and we drew the output voltage response curve of the piezoelectric film sensor under different loads. The measurement error was 4.03% when repeating the experiment six times. The research achievements reveal the excellent performance of the piezoelectric film sensor directly deposited on a GH4169 superalloy steel substrate. This method can reduce measurement error caused by the adhesive and reduce the risk of falling off caused by the aging of the adhesive, which provides a basis for the research of smart bolts and guarantees a better application in structural health monitoring (SHM).
目前，压电传感器主要应用于健康监测领域。由于粘合剂的耐久性，它们可能会脱落，甚至损坏被监测设备。本文提出了一种基于正压电效应（PPE）的压电薄膜传感器（PFS），并采用磁控溅射在GH4169高温合金钢（GSS）基板上沉积了ZnO薄膜。通过X射线衍射仪（XRD）、能谱仪（EDS）、扫描电子显微镜（SEM）和原子力显微镜（AFM）对ZnO压电薄膜的微观结构和显微照片进行了分析。结果表明，表面形貌致密均匀，具有良好的c轴择优取向。根据五个压电传感器的测试结果，纵向压电系数的平均值为1.36 pC/N，静态校准灵敏度的平均值为19.77 mV/N。我们选择参数最接近平均值的传感器进行动态测试实验，并绘制了压电薄膜传感器在不同载荷下的输出电压响应曲线。重复实验六次时测量误差为4.03%。研究成果揭示了直接沉积在GH4169高温合金钢基板上的压电薄膜传感器的优异性能。该方法可以减少由粘合剂引起的测量误差，降低粘合剂老化导致脱落的风险，为智能螺栓的研究提供了依据，并保证在结构健康监测（SHM）中有更好的应用。
