Lee Tzu-Nien, Lau John-H, Ko Cheng-Ta, Xia Tim, Lin Eagle, Yang Kai-Ming, Lin Puru-Bruce, Peng Chia-Yu, Chang Leo, Chen Jia-Shiang, Fang Yi-Hsiu, Liao Li-Yueh, Charn Edward, Wang Jason, Tseng Tzyy-Jang
Unimicron Technology Corporation, No. 179, Shanying Road, Taoyuan City 33341, Taiwan.
Materials (Basel). 2022 Mar 24;15(7):2396. doi: 10.3390/ma15072396.
In this study, the Df (dissipation factor or loss tangent) and Dk (dielectric constant or permittivity) of the low-loss dielectric material from three different vendors are measured by the Fabry-Perot open resonator (FPOR) technique. Emphasis is placed on the sample preparation, data collection, and the comparison with the data sheet values provided from vendors. A coplanar waveguide with ground (CPWG) test vehicle with one of these raw dielectric materials (vendor 1) is designed (through Polar and simulation) and fabricated. The impedance of the test vehicle is measured by TDR (time-domain reflectometer), and the effective Dk of the test vehicle is calculated by the real cross-section of the metal line width, spacing, and thickness of the test vehicle and a closed-form equation. In parallel, the insertion loss and return loss are measured with the VNA (vector network analyzer) of the test vehicle. Finally, the measurement and simulation results are correlated. Some recommendations on the low-loss dielectric materials of the Dk and Df are also provided.
在本研究中，采用法布里-珀罗开放谐振器（FPOR）技术测量了来自三个不同供应商的低损耗介电材料的损耗因数（Df）和介电常数（Dk）。重点在于样品制备、数据收集以及与供应商提供的数据手册值进行比较。设计（通过Polar和仿真）并制造了一种带有其中一种原始介电材料（供应商1）的共面接地波导（CPWG）测试载体。通过时域反射仪（TDR）测量测试载体的阻抗，并根据测试载体金属线宽、间距和厚度的实际横截面以及一个闭式方程计算测试载体的有效Dk。同时，使用矢量网络分析仪（VNA）测量测试载体的插入损耗和回波损耗。最后，将测量结果与仿真结果进行关联。还提供了一些关于Dk和Df的低损耗介电材料的建议。
