Cai Xianfa, Wang Yiqin, Cao Yunqi, Yang Wenyu, Xia Tian, Li Wei
College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046, China.
State Key Laboratory of Industrial Control Technology, College of Control Science and Engineering, Zhejiang University, Hangzhou 310027, China.
Sensors (Basel). 2024 Jun 4;24(11):3625. doi: 10.3390/s24113625.
Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.
基于压电材料的器件因其独特的物理特性而受到科学家和工程师的广泛关注，从而产生了众多有趣且实用的应用。其中，弯曲模式压电谐振器（FMPR）因其在各种应用中紧凑、精确且高效的性能而日益受到重视。FMPR是利用一维或二维压电材料作为其谐振结构的谐振器，以弯曲模式振动。谐振器的谐振特性直接影响其性能，因此深入研究FMPR的谐振特性对于优化其设计和提高其性能具有实际意义。随着微纳电子技术的迅速发展，FMPR的应用范围不断扩大。这些谐振器代表了压电材料在微纳机电系统中的应用领域，已在物理传感领域得到广泛应用，并开始应用于微功率系统和生物医学领域。本文综述了FMPR的结构、工作原理、谐振特性、应用及未来前景。
