Notaros Milica, Dyer Thomas, Raval Manan, Baiocco Christopher, Notaros Jelena, Watts Michael R
Opt Express. 2022 Apr 11;30(8):13790-13801. doi: 10.1364/OE.454494.
In this work, an integrated liquid-crystal-based phase modulator operating at visible wavelengths was developed and experimentally demonstrated. A visible-light silicon-nitride-based 300-mm-wafer foundry platform and a liquid-crystal integration process were developed to leverage the birefringence of liquid crystal to actively tune the effective index of a section of silicon-nitride waveguide and induce a phase shift over its length. The device was experimentally shown to achieve a 41π phase shift within 4.8 V for a 500-µm-long modulator, which means that a 2π phase shifter would need to be only 24.4 µm long. This device is a compact and low-power solution to the challenge of integrated phase modulation in silicon nitride and paves the way for future low-power small-form-factor integrated systems at visible wavelengths.
在这项工作中，开发并通过实验演示了一种工作在可见光波长的基于液晶的集成相位调制器。开发了一种基于可见光氮化硅的300毫米晶圆代工平台和液晶集成工艺，以利用液晶的双折射来主动调节一段氮化硅波导的有效折射率，并在其长度上诱导相移。实验表明，对于一个500微米长的调制器，该器件在4.8伏电压下可实现41π的相移，这意味着一个2π移相器只需24.4微米长。该器件是解决氮化硅集成相位调制挑战的一种紧凑且低功耗的解决方案，为未来可见光波长下的低功耗小尺寸集成系统铺平了道路。
