Sachan Priyanka, Singh Radhakant, Dwivedi Prabhat K, Sharma Ashutosh
Department of Chemical Engineering & Center for Nanosciences, Indian Institute of Technology Kanpur Kanpur India-208016
RSC Adv. 2018 Aug 6;8(49):27946-27955. doi: 10.1039/c8ra03249a. eCollection 2018 Aug 2.
This work demonstrates the fabrication of chalcogenide microstructures such as gratings, lenses and needles using a lithographically directed, evaporative self-organization of chalcogenide thin liquid films for the first time. Using a two-step annealing protocol, excess solvent of freshly coated ChG films is eliminated and then the liquid films are patterned using elastomeric masters with continuous or disconnected features during solvent evaporation. Although microcontact printing or capillary flow lithography has been proven to be useful to create continuous gratings and waveguide like structures in solid films, our method overcomes the limitation of structural continuity of the generated pattern and uses self-organization of solute ChG within the master's confinement to produce isolated microstructures. Fabrication of disjointed arrays of microlenses of various dimensions as well as conical shaped needles in ChG thin films has been demonstrated for relevant optical IR applications. This methodology establishes evaporative self-organization of ChG thin films as a viable alternative to creating microstructures in bulk ChG with hot-embossing, bypassing the need for ultra high temperature processing.
这项工作首次展示了利用硫族化物薄液膜的光刻导向蒸发自组装来制造诸如光栅、透镜和针等硫族化物微结构。采用两步退火方案,消除新涂覆的硫族化物玻璃(ChG)薄膜中的过量溶剂,然后在溶剂蒸发过程中使用具有连续或间断特征的弹性体模板对液膜进行图案化。尽管微接触印刷或毛细管流动光刻已被证明可用于在固体薄膜中创建连续光栅和波导状结构,但我们的方法克服了所生成图案结构连续性的限制,并利用溶质硫族化物玻璃在模板限制范围内的自组装来制造孤立的微结构。已展示了在硫族化物玻璃薄膜中制造各种尺寸的微透镜不连续阵列以及锥形针,用于相关的红外光学应用。这种方法确立了硫族化物玻璃薄膜的蒸发自组装作为一种可行的替代方法,可避免使用热压印在块状硫族化物玻璃中制造微结构,无需超高温处理。