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具有h-BN电介质的双栅多层MoS场效应晶体管的静电可控沟道厚度和可调低频噪声特性

Electrostatically Controllable Channel Thickness and Tunable Low-Frequency Noise Characteristics of Double-Gated Multilayer MoS Field-Effect Transistors with h-BN Dielectric.

作者信息

Park Jimin, Nam Junho, Son Jangyup, Jung Won Jun, Park Min, Lee Dong Su, Jeon Dae-Young

机构信息

Institute of Advanced Composite Materials, Korea Institute of Science and Technology, Joellabuk-do 55324, South Korea.

Division of Nano and Information Technology, KIST School University of Science and Technology (UST), Jeonbuk 55324, South Korea.

出版信息

ACS Appl Mater Interfaces. 2022 Jun 8;14(22):25763-25769. doi: 10.1021/acsami.2c05294. Epub 2022 May 26.

DOI:10.1021/acsami.2c05294
PMID:35617622
Abstract

Two-dimensional transition-metal dichalcogenide (TMD) materials have attracted increasing attention in efforts to overcome fundamental issues faced by the complementary metal-oxide-semiconductor industry. Multilayer TMD materials such as MoS can be used for high-performance transistor-based applications; the drive currents are high and the materials handle low-frequency (LF) noise well. We fabricated double-gated multilayer MoS transistors using the h-BN dielectric for the top gate and silicon dioxide for the bottom gate. We systemically investigated the bottom gate voltage ()-controlled electrical characteristics and the top/bottom interface-coupling effects. The effective thickness of the MoS channel () was well modulated by , and reduction by negative dramatically improved the / ratio. Numerical simulation and analytical modeling with a variation of the depletion depth under different bias conditions verified the experimental results. We were also the first to observe -tuned LF noise characteristics. Here, we discuss the -affected series resistance and carrier mobility in detail. Our findings greatly enhance the understanding of how double-gated multilayer MoS transistors operate and will facilitate performance optimization in the real world.

摘要

二维过渡金属二硫属化物(TMD)材料在克服互补金属氧化物半导体行业所面临的基本问题的努力中受到了越来越多的关注。多层TMD材料,如MoS,可用于基于高性能晶体管的应用;驱动电流高,且材料对低频(LF)噪声处理良好。我们使用h-BN电介质作为顶栅,二氧化硅作为底栅,制造了双栅多层MoS晶体管。我们系统地研究了底栅电压()控制的电学特性以及顶/底界面耦合效应。MoS沟道()的有效厚度通过得到了很好的调制,并且负的使减小,显著提高了/比。在不同偏置条件下,通过改变耗尽深度进行的数值模拟和分析建模验证了实验结果。我们也是第一个观察到调谐的低频噪声特性的。在此,我们详细讨论了受影响的串联电阻和载流子迁移率。我们的发现极大地增进了对双栅多层MoS晶体管如何工作的理解,并将有助于在实际应用中优化性能。

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