Dong Tianshu, Chen Lei, Shih Albert
Mechanical Engineering, University of Michigan, 2370 GG Brown, 2350 Hayward Street, Ann Arbor, MI 48109.
Mechanical Engineering, University of Massachusetts Lowell, Dandeneau Hall 231, 1 University Ave., Lowell, MA 01854.
J Micro Nanomanuf. 2020 Dec 1;8(4):041013. doi: 10.1115/1.4049780. Epub 2021 Feb 12.
Microwire microelectrode arrays (MEAs) are implanted in the brain for recording neuron activities to study the brain function. Among various microwire materials, carbon fiber stands out due to its small diameter (5-10 m), relatively high Young's modulus, and low electrical resistance. Microwire tips in MEAs are often sharpened to reduce the insertion force and prevent the thin microwires from buckling. Currently, carbon fiber MEAs are sharpened by either torch burning, which limits the positions of wire tips to a water bath surface plane, or electrical discharge machining, which is difficult to implement to the nonelectrically conductive carbon fiber with parylene-C insulation. A laser-based carbon fiber sharpening method proposed in this study enables the fabrication of carbon fiber MEAs with sharp tips and custom lengths. Experiments were conducted to study effects of laser input voltage and transverse speed on carbon fiber tip geometry. Results of the tip sharpness and stripped length of the insulation as well as the electrochemical impedance spectroscopy measurement at 1 kHz were evaluated and analyzed. The laser input voltage and traverse speed have demonstrated to be critical for the sharp tip, short stripped length, and low electrical impedance of the carbon fiber electrode for brain recording MEAs. A carbon fiber MEA with custom electrode lengths was fabricated to validate the laser-based approach.
微丝微电极阵列(MEA)被植入大脑以记录神经元活动,从而研究大脑功能。在各种微丝材料中,碳纤维因其直径小(5 - 10μm)、相对较高的杨氏模量和低电阻而脱颖而出。MEA中的微丝尖端通常会被锐化,以减小插入力并防止细微丝弯曲。目前,碳纤维MEA的锐化方法要么是火焰灼烧,这将丝尖位置限制在水浴表面平面,要么是电火花加工,而对于带有聚对二甲苯-C绝缘层的非导电碳纤维来说,这种方法很难实施。本研究提出的一种基于激光的碳纤维锐化方法能够制造出具有尖锐尖端和定制长度的碳纤维MEA。进行了实验以研究激光输入电压和横向速度对碳纤维尖端几何形状的影响。对尖端锐度、绝缘层剥除长度的结果以及在1kHz下的电化学阻抗谱测量进行了评估和分析。激光输入电压和横向速度已被证明对于用于大脑记录MEA的碳纤维电极的尖锐尖端、短剥除长度和低电阻至关重要。制造了具有定制电极长度的碳纤维MEA以验证基于激光的方法。