Xu Baohui, Chen Rongmei, Zhou Jiuren, Liang Jie
School of Microelectronics, Shanghai University, Shanghai 201800, China.
Interuniversity Microelectronics Centre (IMEC), 3001 Leuven, Belgium.
Micromachines (Basel). 2022 Jul 20;13(7):1148. doi: 10.3390/mi13071148.
Along with deep scaling transistors and complex electronics information exchange networks, very-large-scale-integrated (VLSI) circuits require high performance and ultra-low power consumption. In order to meet the demand of data-abundant workloads and their energy efficiency, improving only the transistor performance would not be sufficient. Super high-speed microprocessors are useless if the capacity of the data lines is not increased accordingly. Meanwhile, traditional on-chip copper interconnects reach their physical limitation of resistivity and reliability and may no longer be able to keep pace with a processor's data throughput. As one of the potential alternatives, carbon nanotubes (CNTs) have attracted important attention to become the future emerging on-chip interconnects with possible explorations of new development directions. In this paper, we focus on the electrical, thermal, and process compatibility issues of current on-chip interconnects. We review the advantages, recent developments, and dilemmas of CNT-based interconnects from the perspective of different interconnect lengths and through-silicon-via (TSV) applications.
随着晶体管的深度缩放和复杂的电子信息交换网络的发展,超大规模集成电路(VLSI)需要高性能和超低功耗。为了满足数据丰富的工作负载及其能源效率的需求,仅提高晶体管性能是不够的。如果数据线的容量不相应增加,超高速微处理器将毫无用处。与此同时,传统的片上铜互连在电阻率和可靠性方面达到了物理极限,可能无法再跟上处理器的数据吞吐量。作为潜在的替代方案之一,碳纳米管(CNT)已引起重要关注,有望成为未来新兴的片上互连,并有可能探索新的发展方向。在本文中,我们关注当前片上互连的电气、热和工艺兼容性问题。我们从不同互连长度和硅通孔(TSV)应用的角度回顾了基于碳纳米管的互连的优势、最新进展和困境。