发展适用于低压等离子体诊断的侧向电子密度（MOLE）探针测量技术。

Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics.

机构信息

Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.

Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34104, South Korea.

出版信息

Sensors (Basel). 2022 Jul 22;22(15):5487. doi: 10.3390/s22155487.

DOI:10.3390/s22155487

PMID:35897990

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9331997/

Abstract

As the importance of measuring electron density has become more significant in the material fabrication industry, various related plasma monitoring tools have been introduced. In this paper, the development of a microwave probe, called the measurement of lateral electron density (MOLE) probe, is reported. The basic properties of the MOLE probe are analyzed via three-dimensional electromagnetic wave simulation, with simulation results showing that the probe estimates electron density by measuring the surface wave resonance frequency from the reflection microwave frequency spectrum (S11). Furthermore, an experimental demonstration on a chamber wall measuring lateral electron density is conducted by comparing the developed probe with the cutoff probe, a precise electron density measurement tool. Based on both simulation and experiment results, the MOLE probe is shown to be a useful instrument to monitor lateral electron density.

摘要

随着测量电子密度在材料制造行业变得越来越重要，各种相关的等离子体监测工具已经被引入。在本文中，报告了一种微波探针的发展，称为横向电子密度测量（MOLE）探针。通过三维电磁波模拟分析了 MOLE 探针的基本特性，模拟结果表明，探针通过测量从反射微波频谱（S11）中的表面波共振频率来估计电子密度。此外，通过将开发的探头与精确的电子密度测量工具——截止探头进行比较，在腔壁上进行了横向电子密度的实验演示。基于模拟和实验结果，表明 MOLE 探头是一种用于监测横向电子密度的有用工具。