通过表面声波色散模拟评估薄膜结构的粘附特性

Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation.

作者信息

Choi Yu Min, Kang Dongchan, Kim Jeong Nyeon, Park Ik Keun

机构信息

Department of Mechanical Engineering, Graduate School, Seoul National University of Science and Technology, Seoul 01811, Korea.

Graduate School of Nano IT Design Fusion, Seoul National University of Science and Technology, Seoul 01811, Korea.

出版信息

Materials (Basel). 2022 Aug 16;15(16):5637. doi: 10.3390/ma15165637.

DOI:10.3390/ma15165637

PMID:36013773

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9413970/

Abstract

A theoretical simulation study of the dispersion characteristic of the surface acoustic wave (Rayleigh wave) was conducted by modeling the adhesion interlayer with stiffness coefficients to evaluate the bonding properties of nano-scale thin film structures. For experimental validation, a set of thin film specimens were fabricated-637 nm, 628 nm, 637 nm, 600 nm, and 600 nm thick titanium (Ti) films were deposited on silicon (Si) (100) substrate using a DC Magnetron sputtering process with DC power from 28.8 W, 57.6 W, 86.4 W, 115.2 W, and 144 W. The thicknesses of the Ti films were measured using a scanning electron microscope (SEM). Surface acoustic wave velocity for each of the manufactured thin film specimens was measured by using a V(z) curve technique of a Scanning Acoustic Microscope. The measured velocity, transducer frequency, and thickness of the film were applied to dispersion characteristic simulation for a given stiffness coefficient to calculate adhesion strength of each specimen. To verify the simulation result, the adhesion force of each specimen was measured using a nano-scratch test and then compared with the calculated values from the dispersion characteristic simulation. The value of adhesion strength from the dispersion characteristic simulation and the value of adhesion force of the nano-scratch test were found to have a similar tendency according to the process variable of the thin film. The results demonstrated that the adhesion strength of a thin film could be evaluated quantitatively by calculating the dispersion characteristics with the adhesion interlayer stiffness model.

摘要

通过用刚度系数对粘附中间层进行建模，开展了表面声波（瑞利波）色散特性的理论模拟研究，以评估纳米级薄膜结构的键合性能。为进行实验验证，制备了一组薄膜试样——采用直流磁控溅射工艺，在硅（Si）（100）衬底上沉积了厚度分别为637 nm、628 nm、637 nm、600 nm和600 nm的钛（Ti）薄膜，直流功率分别为28.8 W、57.6 W、86.4 W、115.2 W和144 W。使用扫描电子显微镜（SEM）测量Ti薄膜的厚度。通过扫描声学显微镜的V（z）曲线技术测量每个制备的薄膜试样的表面声波速度。将测得的速度、换能器频率和薄膜厚度应用于给定刚度系数的色散特性模拟，以计算每个试样的粘附强度。为验证模拟结果，使用纳米划痕试验测量每个试样的粘附力，然后与色散特性模拟的计算值进行比较。根据薄膜工艺变量，发现色散特性模拟的粘附强度值与纳米划痕试验的粘附力值具有相似的趋势。结果表明，通过用粘附中间层刚度模型计算色散特性，可以定量评估薄膜的粘附强度。