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泡沫镍辅助结构制备具有大单晶晶畴的石墨烯及其高增益场效应晶体管

Growth of graphene with large single-crystal domains by Ni foam-assisted structure and its high-gain field-effect transistors.

作者信息

Gao Xuedong, Yu Cui, He Zezhao, Song Xubo, Liu Qingbin, Zhou Chuangjie, Guo Jianchao, Cai Shujun, Feng Zhihong

机构信息

National Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research Institute Shijiazhuang 050051 Hebei Province China

出版信息

Nanoscale Adv. 2018 Dec 13;1(3):1130-1135. doi: 10.1039/c8na00203g. eCollection 2019 Mar 12.

DOI:10.1039/c8na00203g
PMID:36133206
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9473297/
Abstract

High-quality graphene materials and high-performance graphene transistors have attracted much attention in recent years. To obtain high-performance graphene transistors, large single-crystal graphene is needed. The synthesis of large-domain-sized single-crystal graphene requires low nucleation density; this can lead to a lower growth rate. In this study, a Ni-foam assisted structure was developed to control the nucleation density and growth rate of graphene by tuning the flow dynamics. Lower nucleation density and high growth rate (∼50 μm min) were achieved with a 4 mm-gap Ni foam. With the graphene transistor fabrication process, a pre-deposited Au film as the protective layer was used during the graphene transfer. Graphene transistors showed good current saturation with drain differential conductance as low as 0.04 S mm in the strong saturation region. For the devices with gate length of 2 μm, the intrinsic cut-off frequency and maximum oscillation frequency were 8.4 and 16.3 GHz, respectively, with / = 1.9 and power gain of up to 6.4 dB at 1 GHz. The electron velocity saturation induced by the surface optical phonons of SiO substrates was analyzed. Electron velocity saturation and ultra-thin AlO gate dielectrics were thought to be the reasons for the good current saturation and high power gain of the graphene transistors.

摘要

近年来,高质量的石墨烯材料和高性能的石墨烯晶体管备受关注。为了获得高性能的石墨烯晶体管,需要大尺寸的单晶石墨烯。大尺寸单晶石墨烯的合成需要低成核密度,这可能导致较低的生长速率。在本研究中,开发了一种泡沫镍辅助结构,通过调节流动动力学来控制石墨烯的成核密度和生长速率。使用4毫米间隙的泡沫镍实现了较低的成核密度和较高的生长速率(约50μm/min)。在石墨烯晶体管制造过程中,在石墨烯转移过程中使用预沉积的金膜作为保护层。石墨烯晶体管在强饱和区域表现出良好的电流饱和,漏极微分电导低至0.04S/mm。对于栅极长度为2μm的器件,本征截止频率和最大振荡频率分别为8.4和16.3GHz,/=1.9,在1GHz时功率增益高达6.4dB。分析了SiO衬底表面光学声子引起的电子速度饱和。电子速度饱和和超薄AlO栅极电介质被认为是石墨烯晶体管具有良好电流饱和和高功率增益的原因。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/76164f8b8071/c8na00203g-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/e300389101d4/c8na00203g-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/95a55c11317d/c8na00203g-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/5f3d0f887a7d/c8na00203g-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/76164f8b8071/c8na00203g-f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/e300389101d4/c8na00203g-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/95a55c11317d/c8na00203g-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/5f3d0f887a7d/c8na00203g-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/165b/9473297/76164f8b8071/c8na00203g-f5.jpg

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