Esposito William, Martin-Monier Louis, Piveteau Pierre-Luc, Xu Bingrui, Deng Daosheng, Sorin Fabien
Laboratory for Photonic and Fiber devices, Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland.
Department of Basic Courses, Naval University of Engineering, Wuhan, China.
Nat Commun. 2022 Oct 18;13(1):6154. doi: 10.1038/s41467-022-33853-1.
Long and flexible arrays of nanowires find impactful applications in sensing, photonics, and energy harvesting. Conventional manufacturing relies largely on lithographic methods limited in wafer size, rigidity, and machine write time. Here, we report a scalable process to generate encapsulated flexible nanowire arrays with high aspect ratios and excellent tunable size and periodicity. Our strategy is to control nanowire self-assembly into 2D and 3D architectures via the filamentation of a textured thin film under anisotropic stretching. This is achieved by coupling soft lithography, glancing angle deposition, and thermal drawing to obtain well-ordered meters-long nanowires with diameters down to 50 nanometers. We demonstrate that the nanowire diameter and period of the array can be decoupled and manipulated independently. We propose a filamentation criterion and perform numerical simulations implementing destabilizing long-range Van der Waals interactions. Applied to high-index chalcogenide glasses, we show that this decoupling allows for tuning diffraction. Finally, harnessing Mie resonance, we demonstrate the possibility of manufacturing macroscopic meta-grating superstructures for nanophotonic applications.
长且灵活的纳米线阵列在传感、光子学和能量收集等领域有着重要应用。传统制造方法主要依赖光刻技术，而光刻技术在晶圆尺寸、刚性和机器写入时间方面存在限制。在此，我们报告了一种可扩展的工艺，用于生成具有高纵横比、出色的可调尺寸和周期性的封装柔性纳米线阵列。我们的策略是通过在各向异性拉伸下使纹理化薄膜丝状化，将纳米线自组装成二维和三维结构。这是通过结合软光刻、掠角沉积和热拉伸来实现的，从而获得直径低至50纳米、排列有序且长达数米的纳米线。我们证明了纳米线直径和阵列周期可以独立解耦和操控。我们提出了一个丝状化准则，并进行了数值模拟，模拟中考虑了破坏稳定性的长程范德华相互作用。应用于高折射率硫族化物玻璃时，我们表明这种解耦能够实现衍射调谐。最后，利用米氏共振，我们展示了制造用于纳米光子应用的宏观超结构元光栅的可能性。
