Filipovic Lado, Selberherr Siegfried
Institute for Microelectronics, TU Wien, Gußhuasstraße 27-29/E360, 1040 Vienna, Austria.
Nanomaterials (Basel). 2022 Oct 18;12(20):3651. doi: 10.3390/nano12203651.
During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, and sensors, on the same chip. In the case of gas sensor integration, it is necessary that future devices can be manufactured using a fabrication technology which is also compatible with the processes applied to digital logic transistors. This will likely involve adopting the mature complementary metal oxide semiconductor (CMOS) fabrication technique or a technique which is compatible with CMOS due to the inherent low costs, scalability, and potential for mass production that this technology provides. While chemiresistive semiconductor metal oxide (SMO) gas sensors have been the principal semiconductor-based gas sensor technology investigated in the past, resulting in their eventual commercialization, they need high-temperature operation to provide sufficient energies for the surface chemical reactions essential for the molecular detection of gases in the ambient. Therefore, the integration of a microheater in a MEMS structure is a requirement, which can be quite complex. This is, therefore, undesirable and room temperature, or at least near-room temperature, solutions are readily being investigated and sought after. Room-temperature SMO operation has been achieved using UV illumination, but this further complicates CMOS integration. Recent studies suggest that two-dimensional (2D) materials may offer a solution to this problem since they have a high likelihood for integration with sophisticated CMOS fabrication while also providing a high sensitivity towards a plethora of gases of interest, even at room temperature. This review discusses many types of promising 2D materials which show high potential for integration as channel materials for digital logic field effect transistors (FETs) as well as chemiresistive and FET-based sensing films, due to the presence of a sufficiently wide band gap. This excludes graphene from this review, while recent achievements in gas sensing with graphene oxide, reduced graphene oxide, transition metal dichalcogenides (TMDs), phosphorene, and MXenes are examined.
在过去几十年里,微电子行业一直在积极研究将基于半导体的器件(包括射频和模拟电路、生物芯片及传感器)在数字逻辑和存储器之外进行功能集成到同一芯片上的潜力。就气体传感器集成而言,未来的器件必须采用与数字逻辑晶体管制造工艺兼容的制造技术来制造。由于成熟的互补金属氧化物半导体(CMOS)制造技术具有固有的低成本、可扩展性和大规模生产潜力,这可能意味着要采用该技术或与之兼容的技术。虽然化学电阻型半导体金属氧化物(SMO)气体传感器一直是过去研究的主要基于半导体的气体传感器技术,并最终实现了商业化,但它们需要高温操作才能为环境中气体分子检测所必需的表面化学反应提供足够的能量。因此,在微机电系统(MEMS)结构中集成微加热器是一项要求,而这可能相当复杂。所以,这是不可取的,目前正在积极研究和寻求室温或至少接近室温的解决方案。利用紫外线照射已实现室温下的SMO操作,但这进一步使CMOS集成复杂化。最近的研究表明,二维(2D)材料可能为这个问题提供解决方案,因为它们很有可能与复杂的CMOS制造工艺集成,同时即使在室温下也对大量感兴趣的气体具有高灵敏度。本综述讨论了许多有前景的二维材料,由于其存在足够宽的带隙,这些材料作为数字逻辑场效应晶体管(FET)的沟道材料以及化学电阻型和基于FET的传感薄膜具有很高的集成潜力。本综述不包括石墨烯,同时研究了氧化石墨烯、还原氧化石墨烯、过渡金属二硫属化物(TMD)、磷烯和MXene在气体传感方面的最新成果。