Suppr超能文献

石墨烯模拟与硅互补金属氧化物半导体数字电路的混合集成。

Hybrid Integration of Graphene Analog and Silicon Complementary Metal-Oxide-Semiconductor Digital Circuits.

机构信息

Department of Electrical Engineering, KAIST , Daejeon 305-701, Republic of Korea.

Department of Materials Engineering, Korea Aerospace University , Gyeonggi-do 412-791, Korea.

出版信息

ACS Nano. 2016 Jul 26;10(7):7142-6. doi: 10.1021/acsnano.6b03382. Epub 2016 Jul 15.

Abstract

We demonstrate a hybrid integration of a graphene-based analog circuit and a silicon-based digital circuit in order to exploit the strengths of both graphene and silicon devices. This mixed signal circuit integration was achieved using a three-dimensional (3-D) integration technique where a graphene FET multimode phase shifter is fabricated on top of a silicon complementary metal-oxide-semiconductor field-effect transistor (CMOS FET) ring oscillator. The process integration scheme presented here is compatible with the conventional silicon CMOS process, and thus the graphene circuit can successfully be integrated on current semiconductor technology platforms for various applications. This 3-D integration technique allows us to take advantage of graphene's excellent inherent properties and the maturity of current silicon CMOS technology for future electronics.

摘要

我们展示了一种基于石墨烯的模拟电路和基于硅的数字电路的混合集成,以充分利用石墨烯和硅器件的优势。这种混合信号电路集成是使用三维(3-D)集成技术实现的,其中在硅互补金属氧化物半导体场效应晶体管(CMOS FET)环形振荡器顶部制造了基于石墨烯 FET 的多模移相器。这里提出的工艺集成方案与传统的硅 CMOS 工艺兼容,因此石墨烯电路可以成功地集成在当前的半导体技术平台上,用于各种应用。这种 3-D 集成技术使我们能够充分利用石墨烯的优异固有特性和当前硅 CMOS 技术的成熟性,用于未来的电子学。

文献AI研究员

20分钟写一篇综述,助力文献阅读效率提升50倍。

立即体验

用中文搜PubMed

大模型驱动的PubMed中文搜索引擎

马上搜索

文档翻译

学术文献翻译模型,支持多种主流文档格式。

立即体验