Nikolic Maria Vesna, Milovanovic Vladimir, Vasiljevic Zorka Z, Stamenkovic Zoran
Institute for Multidisciplinary Research, University of Belgrade, 11030 Belgrade, Serbia.
Faculty of Engineering, University of Kragujevac, 34000 Kragujevac, Serbia.
Sensors (Basel). 2020 Nov 23;20(22):6694. doi: 10.3390/s20226694.
This paper presents an overview of semiconductor materials used in gas sensors, their technology, design, and application. Semiconductor materials include metal oxides, conducting polymers, carbon nanotubes, and 2D materials. Metal oxides are most often the first choice due to their ease of fabrication, low cost, high sensitivity, and stability. Some of their disadvantages are low selectivity and high operating temperature. Conducting polymers have the advantage of a low operating temperature and can detect many organic vapors. They are flexible but affected by humidity. Carbon nanotubes are chemically and mechanically stable and are sensitive towards NO and NH, but need dopants or modifications to sense other gases. Graphene, transition metal chalcogenides, boron nitride, transition metal carbides/nitrides, metal organic frameworks, and metal oxide nanosheets as 2D materials represent gas-sensing materials of the future, especially in medical devices, such as breath sensing. This overview covers the most used semiconducting materials in gas sensing, their synthesis methods and morphology, especially oxide nanostructures, heterostructures, and 2D materials, as well as sensor technology and design, application in advance electronic circuits and systems, and research challenges from the perspective of emerging technologies.
本文概述了气体传感器中使用的半导体材料、其技术、设计和应用。半导体材料包括金属氧化物、导电聚合物、碳纳米管和二维材料。金属氧化物因其易于制造、成本低、灵敏度高和稳定性好，最常被作为首选。它们的一些缺点是选择性低和工作温度高。导电聚合物具有工作温度低的优点，并且可以检测许多有机蒸汽。它们具有柔韧性，但受湿度影响。碳纳米管在化学和机械方面稳定，对NO和NH敏感，但需要掺杂剂或改性才能检测其他气体。作为二维材料的石墨烯、过渡金属硫属化合物、氮化硼、过渡金属碳化物/氮化物、金属有机框架和金属氧化物纳米片代表了未来的气体传感材料，特别是在医疗设备中，如呼吸传感。本综述涵盖了气体传感中最常用的半导体材料、它们的合成方法和形态，特别是氧化物纳米结构、异质结构和二维材料，以及传感器技术和设计、在先进电子电路和系统中的应用，以及从新兴技术角度来看的研究挑战。
