Liu Daosen, Wei Shengsheng, Wang Dejun
Liaoning Key Lab of Integrated Circuit and Biomedical Electronic System, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116024, China.
Communication and Electronic Engineering Institute, Qiqihar University, Qiqihar 161006, China.
Sensors (Basel). 2022 Oct 21;22(20):8082. doi: 10.3390/s22208082.
The high demand for pressure devices with miniaturization and a wide bearing range has encouraged researchers to explore new high-performance sensors from different approaches. In this study, a sensitive element based on graphene in-plane compression properties for realizing pressure sensing is experimentally prepared using microelectromechanical systems (MEMS) fabrication technology; it consists of a 50 µm thick, 1400 µm wide square multilayer component membrane and a graphene monolayer with a meander pattern. The prepared sample is extensively characterized and analyzed by using various techniques, including atomic force microscopy, Raman spectroscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, COMSOL finite element method, and density functional theory. The sensing performance of the new pressure sensor based on the sensitive element are obtained by theoretical analysis for electromechanical measurements of the sensitive element before and after low-temperature annealing in atmosphere. Results demonstrate that atmospheric annealing at 300 °C enhances the pressure sensing sensitivity by 4 times compared to pristine graphene without annealing, which benefits from the desorption of hydroxyl groups on the graphene surface during annealing. The sensitivity is comparable and even better than that of previous sensors based on graphene in-plane properties. Our results provide new insights into realizing high-performance MEMS devices based on 2D sensitive materials.
对具有小型化和宽承载范围的压力装置的高需求促使研究人员从不同方法探索新型高性能传感器。在本研究中，利用微机电系统（MEMS）制造技术通过实验制备了一种基于石墨烯面内压缩特性以实现压力传感的敏感元件；它由一个50μm厚、1400μm宽的方形多层组件膜和一个具有曲折图案的石墨烯单层组成。通过使用各种技术，包括原子力显微镜、拉曼光谱、红外光谱、X射线光电子能谱、COMSOL有限元方法和密度泛函理论，对制备的样品进行了广泛的表征和分析。基于该敏感元件的新型压力传感器的传感性能是通过对敏感元件在大气中低温退火前后的机电测量进行理论分析获得的。结果表明，与未退火的原始石墨烯相比，300℃的大气退火使压力传感灵敏度提高了4倍，这得益于退火过程中石墨烯表面羟基的解吸。该灵敏度与基于石墨烯面内特性的先前传感器相当，甚至更好。我们的结果为基于二维敏感材料实现高性能MEMS器件提供了新的见解。
