KTH Royal Institute of Technology , 114 28 Stockholm, Sweden.
DPIA, University of Udine , 33100 Udine, Italy.
ACS Nano. 2016 Nov 22;10(11):9879-9886. doi: 10.1021/acsnano.6b02533. Epub 2016 Nov 7.
Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene. Here, we report experimental and theoretical data on the uni- and biaxial piezoresistive properties of suspended graphene membranes applied to piezoresistive pressure sensors. A detailed model that utilizes a linearized Boltzman transport equation describes accurately the charge-carrier density and mobility in strained graphene and, hence, the gauge factor. The gauge factor is found to be practically independent of the doping concentration and crystallographic orientation of the graphene films. These investigations provide deeper insight into the piezoresistive behavior of graphene membranes.
由于其极薄的特性，石墨烯膜在纳米机电设备中充当高度灵敏的传感器。之前，人们已经通过在石墨烯中施加单轴应变来实验验证了石墨烯的压阻效应。在这里，我们报告了关于应用于压阻压力传感器的悬空石墨烯膜的单轴和双轴压阻性能的实验和理论数据。一个利用线性化 Boltzman 输运方程的详细模型准确地描述了应变石墨烯中的载流子密度和迁移率，从而准确地描述了应变系数。应变系数被发现实际上与石墨烯薄膜的掺杂浓度和晶体取向无关。这些研究为石墨烯膜的压阻行为提供了更深入的了解。
