Yang Guoyong, Lu Yunxiang, Wang Bo, Xia Yue, Chen Huanyi, Song Hui, Yi Jian, Deng Lifen, Wang Yuezhong, Li He
Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China.
Materials (Basel). 2022 Nov 4;15(21):7776. doi: 10.3390/ma15217776.
Diamond films prepared by chemical vapor deposition will exhibit different surface morphologies, which are determined by the texture and the structural perfection of the deposited diamond. In general, its surface morphology can be controlled by adjusting the deposition conditions. In the present work, <110> textured diamond film was deposited on single crystalline silicon through pre-seeding by diamond nanosheets, rather than controlling the deposition conditions. The employed diamond nano-sheets were prepared by cleavage along a plane, exhibiting good crystallinity. Before chemical vapor deposition, the as-prepared diamond nano-sheets were pre-seeded on the surface of single crystalline silicon as nucleation sites for diamond growth. SEM and XRD results show that the prepared diamond films have a <110> texture. FIB observation reveals that diamonds homogeneously grow on the pre-seeded diamond nano-sheets during chemical vapor deposition, achieving the diamond film with <110> texture. Our work provides a new strategy to prepare <110> textured diamond film.
通过化学气相沉积制备的金刚石薄膜会呈现出不同的表面形貌，这取决于沉积金刚石的织构和结构完整性。一般来说，其表面形貌可通过调整沉积条件来控制。在本工作中，通过金刚石纳米片预播种在单晶硅上沉积了<110>织构的金刚石薄膜，而不是控制沉积条件。所使用的金刚石纳米片是通过沿一个平面解理制备的，具有良好的结晶性。在化学气相沉积之前，将制备好的金刚石纳米片作为金刚石生长的成核位点预播种在单晶硅表面。扫描电子显微镜（SEM）和X射线衍射（XRD）结果表明，制备的金刚石薄膜具有<110>织构。聚焦离子束（FIB）观察表明，在化学气相沉积过程中，金刚石在预播种的金刚石纳米片上均匀生长，从而获得了具有<110>织构的金刚石薄膜。我们的工作为制备<110>织构的金刚石薄膜提供了一种新策略。
