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非加速老化对聚对二甲苯C性能的影响。

Impact of Non-Accelerated Aging on the Properties of Parylene C.

作者信息

Selbmann Franz, Scherf Christina, Langenickel Jörn, Roscher Frank, Wiemer Maik, Kuhn Harald, Joseph Yvonne

机构信息

Fraunhofer Institute for Electronic Nano Systems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany.

Institute for Electronic and Sensor Materials, TU Bergakademie Freiberg, Gustav-Zeuner-Straße 3, 09599 Freiberg, Germany.

出版信息

Polymers (Basel). 2022 Dec 1;14(23):5246. doi: 10.3390/polym14235246.

DOI:10.3390/polym14235246
PMID:36501649
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9740118/
Abstract

The polymer Parylene combines a variety of excellent properties and, hence, is an object of intensive research for packaging applications, such as the direct encapsulation of medical implants. Moreover, in the past years, an increasing interest for establishing new applications for Parylene is observed. These include the usage of Parylene as a flexible substrate, a dielectric, or a material for MEMS, e.g., a bonding adhesive. The increasing importance of Parylene raises questions regarding the long-term reliability and aging of Parylene as well as the impact of the aging on the Parylene properties. Within this paper, we present the first investigations on non-accelerated Parylene C aging for a period of about five years. Doing so, free-standing Parylene membranes were fabricated to investigate the barrier properties, the chemical stability, as well as the optical properties of Parylene in dependence on different post-treatments to the polymer. These properties were found to be excellent and with only a minor age-related impact. Additionally, the mechanical properties, i.e., the Young's modulus and the hardness, were investigated via nano-indentation over the same period of time. For both mechanical properties only, minor changes were observed. The results prove that Parylene C is a highly reliable polymer for applications that needs a high long-term stability.

摘要

聚对二甲苯聚合物具有多种优异性能，因此成为包装应用领域深入研究的对象，比如用于医疗植入物的直接封装。此外，在过去几年中，人们对开发聚对二甲苯的新应用兴趣日增。这些新应用包括将聚对二甲苯用作柔性基板、电介质或微机电系统（MEMS）材料，例如用作粘结剂。聚对二甲苯重要性的日益提高引发了有关其长期可靠性和老化以及老化对聚对二甲苯性能影响的问题。在本文中，我们首次展示了对聚对二甲苯C进行约五年的非加速老化研究。为此，制备了独立的聚对二甲苯薄膜，以研究聚对二甲苯在不同后处理条件下的阻隔性能、化学稳定性以及光学性能。发现这些性能非常优异，且与老化相关的影响很小。此外，在同一时间段内通过纳米压痕法研究了机械性能，即杨氏模量和硬度。仅对于这两种机械性能，观察到有微小变化。结果证明，聚对二甲苯C对于需要高长期稳定性的应用而言是一种高度可靠的聚合物。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/f61e995ae65c/polymers-14-05246-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/95aecd7bd61c/polymers-14-05246-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/ca16b0e18d93/polymers-14-05246-g0A2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/3734059206fb/polymers-14-05246-g0A3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/3de313a8a7c0/polymers-14-05246-g0A4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/7a7d403f1663/polymers-14-05246-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/35e41b053d52/polymers-14-05246-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/8751f85d9871/polymers-14-05246-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/6dddd15d78c2/polymers-14-05246-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/d3085f2ef42f/polymers-14-05246-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/33dbd9b4e9ec/polymers-14-05246-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/587eee8a7619/polymers-14-05246-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/b7eb61238158/polymers-14-05246-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/f61e995ae65c/polymers-14-05246-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/95aecd7bd61c/polymers-14-05246-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/ca16b0e18d93/polymers-14-05246-g0A2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/3734059206fb/polymers-14-05246-g0A3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/3de313a8a7c0/polymers-14-05246-g0A4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/7a7d403f1663/polymers-14-05246-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/35e41b053d52/polymers-14-05246-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/8751f85d9871/polymers-14-05246-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/6dddd15d78c2/polymers-14-05246-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/d3085f2ef42f/polymers-14-05246-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/33dbd9b4e9ec/polymers-14-05246-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/587eee8a7619/polymers-14-05246-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/b7eb61238158/polymers-14-05246-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0d83/9740118/f61e995ae65c/polymers-14-05246-g009.jpg

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Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices.用于微制造可植入设备长期可靠性的新兴封装技术。
Micromachines (Basel). 2019 Jul 31;10(8):508. doi: 10.3390/mi10080508.
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Insulating Material Requirements for Low-Power-Consumption Electrowetting-Based Liquid Lenses.
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Effect of bias voltage and temperature on lifetime of wireless neural interfaces with Al ₂O₃ and parylene bilayer encapsulation.偏置电压和温度对采用Al₂O₃和聚对二甲苯双层封装的无线神经接口寿命的影响。
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