Zhu Yusi, Zhao Zhan, Fang Zhen, Du Lidong
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2021 Nov 4;12(11):1361. doi: 10.3390/mi12111361.
Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.
基于单谐振器（SRB）的传感器在许多传感应用中蓬勃发展。然而，它们无法满足未来高端市场如超小型质量传感器和超低加速度计的高灵敏度要求，并且容易受到环境影响。幸运的是，将双谐振器或多谐振器集成到传感器中已成为解决此类问题的有效方法。研究表明，基于双谐振器（DRB）和基于多谐振器（MRB）的MEMS传感器有能力抵御环境影响，其灵敏度是SRB传感器的数十倍或数百倍。因此，了解DRB和MRB MEMS传感器背后的最新技术以促进它们在未来高端市场的应用是值得的。
