Colmiais Ivo, Silva Vitor, Borme Jérôme, Alpuim Pedro, Mendes Paulo M
CMEMS-Center for Microelectromechanical Systems, University of Minho, Campus de Azurém, 4800-058 Guimarães, Portugal.
INL-International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715-330 Braga, Portugal.
Micromachines (Basel). 2023 Jan 14;14(1):215. doi: 10.3390/mi14010215.
Graphene has unique properties that can be exploited for radiofrequency applications. Its characterization is key for the development of new graphene devices, circuits, and systems. Due to the two-dimensional nature of graphene, there are challenges in the methodology to extract relevant characteristics that are necessary for device design. In this work, the Thru-Reflect-Line (TRL) calibration was evaluated as a solution to extract graphene's electrical characteristics from 1 GHz to 65 GHz, where the calibration structures' requirements were analyzed. It was demonstrated that thick metallic contacts, a low-loss substrate, and a short and thin contact are necessary to characterize graphene. Furthermore, since graphene's properties are dependent on the polarization voltage applied, a backgate has to be included so that graphene can be characterized for different chemical potentials. Such characterization is mandatory for the design of graphene RF electronics and can be used to extract characteristics such as graphene's resistance, quantum capacitance, and kinetic inductance. Finally, the proposed structure was characterized, and graphene's resistance and quantum capacitance were extracted.
石墨烯具有独特的特性，可用于射频应用。其表征对于新型石墨烯器件、电路和系统的开发至关重要。由于石墨烯的二维特性，在提取器件设计所需相关特性的方法上存在挑战。在这项工作中，评估了直通-反射-传输线（TRL）校准作为从1 GHz到65 GHz提取石墨烯电学特性的解决方案，并分析了校准结构的要求。结果表明，为了表征石墨烯，需要厚金属接触、低损耗衬底以及短而细的接触。此外，由于石墨烯的特性取决于所施加的极化电压，因此必须包含背栅，以便能够针对不同的化学势对石墨烯进行表征。这种表征对于石墨烯射频电子学的设计是必不可少的，并且可用于提取诸如石墨烯的电阻、量子电容和动态电感等特性。最后，对所提出的结构进行了表征，并提取了石墨烯的电阻和量子电容。
