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不同氧分压对MgGaO电阻式随机存取存储器的影响研究。

Investigation of Different Oxygen Partial Pressures on MgGaO-Resistive Random-Access Memory.

作者信息

Kao Yu-Neng, Huang Wei-Lun, Chang Sheng-Po, Lai Wei-Chih, Chang Shoou-Jinn

机构信息

Institute of Microelectronics & Department of Electrical Engineering, National Cheng Kung University, Tainan City 70101, Taiwan.

Department of Photonics, National Cheng Kung University, Tainan City 70101, Taiwan.

出版信息

ACS Omega. 2023 Jan 16;8(4):3705-3712. doi: 10.1021/acsomega.2c04222. eCollection 2023 Jan 31.

Abstract

Different oxygen partial-pressure MgGaO-resistive RAMs (RRAMs) are fabricated to investigate the resistive switching behaviors. The X-ray photoelectron spectroscopy results, set voltage, reset voltage, cycling endurance, and retention time are drawn for comparison. With the increasing oxygen ratio gas flow, the resistive switching characteristics of MgGaO RRAM are drastically elevated by changing the fabrication conditions of the RS layer. Moreover, we portray a filament model to explain the most likely mechanism associated with the generation and rupture of conductive filaments composed of oxygen vacancies. The formation of the interfacial layer (AlO ) and the participation of the Joule heating effect are included to explain the highly distributed high-resistance state (HRS). The high randomness among switching cycles for memory application should be prevented, but it is suitable for the physical unclonable function. The relationship between HRS and the next time set voltage shows a strong correlation, and the conduction mechanisms of the low-resistance state (LRS) and HRS correspond to ohmic conduction and space charge-limited conduction, respectively. Meanwhile, the RRAM undergoes 10,000 s retention tests, and the two resistance states can be distinguished without obvious alternation or degradation. A favorable cycling endurance and retention time achieved by optimizing the fabrication parameters of Al/MgGaO/Pt RRAM have the potential for nonvolatile memristors and information security applications.

摘要

制备了不同氧分压的MgGaO电阻式随机存取存储器(RRAM),以研究其电阻开关行为。绘制了X射线光电子能谱结果、设置电压、复位电压、循环耐久性和保持时间进行比较。随着氧比气体流量的增加,通过改变电阻开关(RS)层的制备条件,MgGaO RRAM的电阻开关特性得到显著提高。此外,我们描绘了一个丝状模型来解释与由氧空位组成的导电细丝的产生和破裂相关的最可能机制。包括界面层(AlO )的形成和焦耳热效应的参与来解释高度分布的高电阻状态(HRS)。应防止存储器应用中开关周期之间的高随机性,但它适用于物理不可克隆功能。HRS与下一次设置电压之间的关系显示出很强的相关性,低电阻状态(LRS)和HRS的传导机制分别对应于欧姆传导和空间电荷限制传导。同时,RRAM进行了10000 s的保持测试,两种电阻状态可以区分,没有明显的交替或退化。通过优化Al/MgGaO/Pt RRAM的制备参数实现的良好循环耐久性和保持时间,对于非易失性忆阻器和信息安全应用具有潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f0e7/9893462/ecf9e075c447/ao2c04222_0002.jpg

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