Highly Reliable Multicomponent MEMS Sensor for Predictive Maintenance Management of Rolling Bearings.

In the field of vibration monitoring and control, the use of low-cost multicomponent MEMS-based accelerometer sensors is nowadays increasingly widespread. Such sensors allow implementing lightweight monitoring systems with low management costs, low power consumption and a small size. However, for the monitoring systems to provide trustworthy and meaningful data, the high accuracy and reliability of sensors are essential requirements. Consequently, a metrological approach to the calibration of multi-component accelerometer sensors, including appropriate uncertainty evaluations, are necessary to guarantee traceability and reliability in the frequency domain of data provided, which nowadays is not fully available. In addition, recently developed metrological characterizations at the microscale level allow to provide detailed and accurate quantification of the enhanced technical performance and the responsiveness of these sensors. In this paper, a dynamic calibration procedure is applied to provide the sensitivity parameters of a low-cost, multicomponent MEMS sensor accelerometer prototype (MDUT), designed, developed and realized at the University of Siena, conceived for rolling bearings vibration monitoring in a broad frequency domain (from 10 Hz up to 25 kHz). The calibration and the metrological characterization of the MDUT are carried out by comparison to a reference standard transducer, at the Primary Vibration Laboratory of the National Institute of Metrological Research (INRiM).