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采用名为GMOS的CMOS-SOI-MEMS传感器对混合气体进行选择性传感。

Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS.

作者信息

Krayden Adir, Shlenkevitch Dima, Blank Tanya, Stolyarova Sara, Nemirovsky Yael

机构信息

Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel.

Todos Technologies, Kinneret 12 Street, Airport City 7019900, Israel.

出版信息

Micromachines (Basel). 2023 Feb 4;14(2):390. doi: 10.3390/mi14020390.

DOI:10.3390/mi14020390
PMID:36838090
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9962487/
Abstract

The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechanical system (CMOS-SOI-MEMS) technologies, and the result is a new pellistor-like sensor, dubbed GMOS, with integrated signal processing. In this study, we describe the performance of such sensors for the selective detection of mixtures of gases. The novel key ideas of this study are: (i) the use of the GMOS for gas sensing; (ii) applying the Kalman filter to improve the signal-to-noise ratio; (iii) adding artificial intelligence (AI) with tiny edge approach.

摘要

实现数字气体传感技术,即一种能够感知并传输含气体数字媒体的技术,被认为极具挑战性。这一挑战促使作者们专注于绝缘体上硅互补金属氧化物半导体微机电系统(CMOS-SOI-MEMS)技术,其成果是一种新型的类似热催化珠的传感器,称为GMOS,并集成了信号处理功能。在本研究中,我们描述了此类传感器对混合气体进行选择性检测的性能。本研究的新颖关键理念包括:(i)使用GMOS进行气体传感;(ii)应用卡尔曼滤波器提高信噪比;(iii)采用微小边缘方法添加人工智能(AI)。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/0d3519225ee2/micromachines-14-00390-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/2fa0d31a57ec/micromachines-14-00390-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/f4bc1ef63686/micromachines-14-00390-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/0d3519225ee2/micromachines-14-00390-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/2fa0d31a57ec/micromachines-14-00390-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/f4bc1ef63686/micromachines-14-00390-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1413/9962487/0d3519225ee2/micromachines-14-00390-g003.jpg

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