Avraham Moshe, Krayden Adir, Ashkar Hanin, Aronin Dan, Stolyarova Sara, Blank Tanya, Shlenkevitch Dima, Nemirovsky Yael
Electrical and Computer Engineering Department, Technion-Israel Institute of Technology, Haifa 3200003, Israel.
TODOS Technologies, Airport City 7019900, Israel.
Micromachines (Basel). 2024 Feb 11;15(2):264. doi: 10.3390/mi15020264.
This is the fourth part of a study presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. The GMOS measures the temperature change due to a combustion exothermic reaction. The controlling parameters of the sensor are the ignition temperature applied to the catalytic layer and the increased temperature of the hotplate due to the released power of the combustion reaction. The solid-state device applies electrical parameters, which are related to the thermal parameters. The heating is applied by Joule heating with a resistor underneath the catalytic layer while the signal is monitored by the change in voltage of the TMOS sensor. Voltage, like temperature, is an intensive parameter, and one always measures changes in such parameters relative to a reference point. The reference point for both parameters (temperature and voltage) is the blind sensor, without any catalytic layer and hence where no reaction takes place. The present paper focuses on the study of the effect of humidity upon performance. In real life, the sensors are exposed to environmental parameters, where humidity plays a significant role. Humidity is high in storage rooms of fruits and vegetables, in refrigerators, in silos, in fields as well as in homes and cars. This study is significant and innovative since it extends our understanding of the performance of the GMOS, as well as pellistor sensors in general, in the presence of humidity. The three main challenges in simulating the performance are (i) how to define the operating temperature based on the input parameters of the heater voltage in the presence of humidity; (ii) how to measure the dynamics of the temperature increase during cyclic operation at a given duty cycle; and (iii) how to model the correlation between the operating temperature and the sensing response in the presence of humidity. Due to the complexity of the 3D analysis of packaged GMOS, and the many aspects of humidity simultanoesuly affecting performane, advanced simulation software is applied, incorporating computational fluid dynamics (CFD). The simulation and experimental data of this study show that the GMOS sensor can operate in the presence of high humidity.
这是一项研究的第四部分，该研究展示了一种基于新型热传感器（称为TMOS）的微型燃烧型气体传感器（称为GMOS）。TMOS是一种微机械加工的CMOS - SOI晶体管，它作为传感元件，并与催化反应板集成在一起，气体在该催化反应板上发生点火。GMOS测量由于燃烧放热反应引起的温度变化。传感器的控制参数是施加到催化层的点火温度以及由于燃烧反应释放的功率导致的加热板温度升高。该固态器件应用与热参数相关的电参数。通过催化层下方的电阻器进行焦耳加热来施加热量，同时通过TMOS传感器的电压变化来监测信号。电压与温度一样，是一个强度参数，人们总是相对于一个参考点来测量此类参数的变化。这两个参数（温度和电压）的参考点是无催化层的盲传感器，因此在该传感器处不发生反应。本文重点研究湿度对性能的影响。在现实生活中，传感器会暴露在环境参数中，其中湿度起着重要作用。水果和蔬菜储存室、冰箱、筒仓、田间以及家庭和汽车中的湿度都很高。这项研究具有重要意义和创新性，因为它扩展了我们对GMOS以及一般情况下 pellistor 传感器在有湿度情况下性能的理解。模拟性能的三个主要挑战是：（i）在有湿度的情况下如何根据加热器电压的输入参数定义工作温度；（ii）如何在给定占空比的循环操作期间测量温度升高的动态过程；（iii）如何在有湿度的情况下对工作温度与传感响应之间的相关性进行建模。由于封装的GMOS的三维分析很复杂，并且湿度同时影响性能的多个方面，因此应用了结合计算流体动力学（CFD）的先进模拟软件。本研究的模拟和实验数据表明，GMOS传感器可以在高湿度环境下工作。
