State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Faw Jiefang Group Co., Ltd., Changchun 130012, China.
Sensors (Basel). 2023 Feb 22;23(5):2431. doi: 10.3390/s23052431.
The angular displacement sensor is a digital angular displacement measurement device that integrates optics, mechanics, and electronics. It has important applications in communication, servo control, aerospace, and other fields. Although conventional angular displacement sensors can achieve extremely high measurement accuracy and resolution, they cannot be integrated because complex signal processing circuitry is required at the photoelectric receiver, which limits their suitability for robotics and automotive applications. The design of a fully integrated line array angular displacement-sensing chip is presented for the first time using a combination of pseudo-random and incremental code channel designs. Based on the charge redistribution principle, a fully differential 12-bit, 1 MSPS sampling rate successive approximation analog-to-digital converter (SAR ADC) is designed for quantization and subdivision of the incremental code channel output signal. The design is verified with a 0.35 μm CMOS process and the area of the overall system is 3.5 × 1.8 mm. The fully integrated design of the detector array and readout circuit is realized for the angular displacement sensing.
角度位移传感器是一种集光学、机械和电子学于一体的数字角度位移测量装置。它在通信、伺服控制、航空航天等领域有重要的应用。尽管传统的角度位移传感器可以达到极高的测量精度和分辨率，但由于光电接收器需要复杂的信号处理电路，因此无法进行集成，这限制了它们在机器人和汽车应用中的适用性。本文首次提出了一种完全集成的线阵角度位移传感芯片的设计，采用伪随机和增量码通道设计相结合的方法。基于电荷再分配原理，设计了一个全差分 12 位、1MSPS 采样率逐次逼近模数转换器(SAR ADC)，用于对增量码通道输出信号进行量化和细分。该设计采用 0.35μm CMOS 工艺进行验证，整个系统的面积为 3.5×1.8mm。实现了探测器阵列和读出电路的完全集成设计，用于角度位移传感。
