Fan Xuge, Forsberg Fredrik, Smith Anderson D, Schröder Stephan, Wagner Stefan, Östling Mikael, Lemme Max C, Niklaus Frank
Department of Micro and Nanosystems, School of Electrical Engineering and Computer Science , KTH Royal Institute of Technology , SE-10044 Stockholm , Sweden.
Scania Tekniskt Centrum , 15148 Södertälje , Sweden.
Nano Lett. 2019 Oct 9;19(10):6788-6799. doi: 10.1021/acs.nanolett.9b01759. Epub 2019 Sep 3.
Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield, and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully clamped at their circumference and have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers, and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents, and are able to suspend larger silicon proof masses, as compared to the previous graphene ribbon devices. These findings are an important step toward bringing ultraminiaturized piezoresistive graphene NEMS closer toward deployment in emerging applications such as in wearable electronics, biomedical implants, and internet of things (IoT) devices.
石墨烯是一种原子级薄的材料，具有独特的电学和力学性能，这使其成为未来纳米机电系统（NEMS）极具前景的材料。最近，通过使用带有悬浮硅质质量块的压阻式石墨烯带，已展示了基本的NEMS加速度计功能。然而，所提出的石墨烯带在机械鲁棒性、制造良率以及可施加在带上的最大测量电流方面存在局限性。在此，我们报道了在其圆周处完全夹紧且附有硅质质量块的悬浮石墨烯膜。我们展示了它们作为压阻式NEMS加速度计的效用，并且发现与先前的石墨烯带器件相比，它们更坚固、寿命更长、制造良率更高，能够承受更高的测量电流，并且能够悬浮更大的硅质质量块。这些发现是朝着使超小型化的压阻式石墨烯NEMS更接近在可穿戴电子设备、生物医学植入物和物联网（IoT）设备等新兴应用中得到应用迈出的重要一步。
